MODULAR INJECTOR AND DEVICE FOR SPATIAL ATOMIC LAYER DEPOSITION
First Claim
1. A modular injector for spatial atomic layer deposition for precursor deposition on a reaction substrate, comprising:
- a precursor channel assembly and a seal assembly;
the precursor channel assembly includes a plate-shaped base, a precursor channel and a gas pipeline;
the precursor channel is disposed on a front surface of the plate-shaped base and extends from top to bottom, and a top end of the precursor channel is communicated with the gas pipeline;
the seal assembly is disposed on the front surface of the plate-shaped base to seal the precursor channel so as to prevent the leakage of a precursor.
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Accused Products
Abstract
A modular injector includes a precursor channel assembly and a seal assembly; the precursor channel assembly includes a plate-shaped base, a precursor channel and a gas pipeline; the precursor channel is disposed on a front surface of the plate-shaped base and extends from top to bottom, and a top end of the precursor channel is communicated with the gas pipeline; the seal assembly is disposed on the front surface of the plate-shaped base. The modular injector includes a plurality of components to form an integral module, and shunts and buffers the introduced gas through the precursor channel to achieve uniform deposition. A device includes multiple modular injectors arranged at an interval, into which the oxidant precursor source and the organo-metallic source are respectively introduced, so that multiple stages of film are deposited on the substrate after the substrate moves for a round trip.
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Citations
10 Claims
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1. A modular injector for spatial atomic layer deposition for precursor deposition on a reaction substrate, comprising:
- a precursor channel assembly and a seal assembly;
the precursor channel assembly includes a plate-shaped base, a precursor channel and a gas pipeline;
the precursor channel is disposed on a front surface of the plate-shaped base and extends from top to bottom, and a top end of the precursor channel is communicated with the gas pipeline;the seal assembly is disposed on the front surface of the plate-shaped base to seal the precursor channel so as to prevent the leakage of a precursor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
- a precursor channel assembly and a seal assembly;
Specification