FLOW RATE CONTROL APPARATUS AND FLOW RATE CONTROL METHOD FOR THE FLOW RATE CONTROL APPARATUS
First Claim
1. A flow rate control apparatus comprising:
- one flow passage;
branch portions at which the flow passage branches into a plurality of branch passages;
control valves disposed in the respective branch passages into which the flow passage branches at the branch portions; and
a monitoring portion configured to monitor a state of a corresponding one of the control valves, whereina flow rate of a fluid is controlled via any one of the control valves disposed in the respective branch passages, andwhen replacement of the one control valve is determined to be necessary on a basis of a signal outputted from the monitoring portion of the one control valve,the one control valve, which is performing flow rate control, is closed, and another one of the control valves, which is disposed in another one of the branch passages, is opened, so as to perform flow rate control such that the flow rate is equivalent to that before the replacement, andon-off valves disposed at an upstream side and a downstream side of the closed control valve are also closed.
1 Assignment
0 Petitions
Accused Products
Abstract
Provided is a flow rate control apparatus capable of being used continuously when the apparatus is used in equipment that operates continuously, and a flow rate control method for the flow rate control apparatus. A flow rate of a fluid is controlled via any one of control valves disposed in branch passages, respectively. When replacement of the one control valve is determined to be necessary on the basis of a signal outputted from a monitoring portion of the one control valve, the one control valve performing flow rate control is closed, and another control valve disposed in another one of the branch passages, is opened, to perform flow rate control with a flow rate equivalent to that before the replacement. Furthermore, on-off valves disposed at upstream and downstream sides of the closed control valve are closed.
-
Citations
10 Claims
-
1. A flow rate control apparatus comprising:
-
one flow passage; branch portions at which the flow passage branches into a plurality of branch passages; control valves disposed in the respective branch passages into which the flow passage branches at the branch portions; and a monitoring portion configured to monitor a state of a corresponding one of the control valves, wherein a flow rate of a fluid is controlled via any one of the control valves disposed in the respective branch passages, and when replacement of the one control valve is determined to be necessary on a basis of a signal outputted from the monitoring portion of the one control valve, the one control valve, which is performing flow rate control, is closed, and another one of the control valves, which is disposed in another one of the branch passages, is opened, so as to perform flow rate control such that the flow rate is equivalent to that before the replacement, and on-off valves disposed at an upstream side and a downstream side of the closed control valve are also closed. - View Dependent Claims (2, 3, 4, 5, 6, 9, 10)
-
-
7. A flow rate control method for a flow rate control apparatus, the flow rate control apparatus comprising,
one flow passage, branch portions at which the flow passage branches into a plurality of branch passages, control valves disposed in the respective branch passages into which the flow passage branches at the branch portions, and a monitoring portion configured to monitor a state of a corresponding one of the control valves, and the flow rate control method comprising: -
a step A of monitoring a state of any one of the control valves, which is performing flow rate control, by the corresponding monitoring portion; a step B of determining whether or not valve replacement is necessary from a signal outputted from the monitoring portion; a step C of, in a case where the replacement is determined to be necessary in the step B, closing the one control valve that is performing flow rate control, and opening another one of the control valves, which is disposed at another one of the branch passages, so as to start flow rate control such that the flow rate is equivalent to that before the replacement; and a step D of closing on-off valves disposed at an upstream side and a downstream side of the closed control valve. - View Dependent Claims (8)
-
Specification