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FLOW RATE CONTROL APPARATUS AND FLOW RATE CONTROL METHOD FOR THE FLOW RATE CONTROL APPARATUS

  • US 20200132216A1
  • Filed: 06/21/2018
  • Published: 04/30/2020
  • Est. Priority Date: 06/22/2017
  • Status: Active Grant
First Claim
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1. A flow rate control apparatus comprising:

  • one flow passage;

    branch portions at which the flow passage branches into a plurality of branch passages;

    control valves disposed in the respective branch passages into which the flow passage branches at the branch portions; and

    a monitoring portion configured to monitor a state of a corresponding one of the control valves, whereina flow rate of a fluid is controlled via any one of the control valves disposed in the respective branch passages, andwhen replacement of the one control valve is determined to be necessary on a basis of a signal outputted from the monitoring portion of the one control valve,the one control valve, which is performing flow rate control, is closed, and another one of the control valves, which is disposed in another one of the branch passages, is opened, so as to perform flow rate control such that the flow rate is equivalent to that before the replacement, andon-off valves disposed at an upstream side and a downstream side of the closed control valve are also closed.

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