SYSTEM FOR REDUCING FRICTION-INDUCED WEAR OF PIPE
First Claim
Patent Images
1. A buffer for holding a pipe adapted to transport a fluid, comprising:
- a base;
a plurality of fingers extending outwardly from a first side of the base, wherein a first finger of the plurality of fingers and a second finger of the plurality of fingers define a cavity for receiving the pipe; and
at least one roller on a second side of the base opposite the first side.
1 Assignment
0 Petitions
Accused Products
Abstract
A buffer for holding a pipe adapted to transport a fluid is provided. The buffer includes a base, a plurality of fingers extending outwardly from a first side of the base. A first finger of the plurality of fingers and a second finger of the plurality of fingers define a cavity for receiving the pipe. The buffer further includes at least one roller on a second side of the base opposite the first side.
-
Citations
20 Claims
-
1. A buffer for holding a pipe adapted to transport a fluid, comprising:
-
a base; a plurality of fingers extending outwardly from a first side of the base, wherein a first finger of the plurality of fingers and a second finger of the plurality of fingers define a cavity for receiving the pipe; and at least one roller on a second side of the base opposite the first side. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
-
-
13. An arrangement in a semiconductor fabrication facility, comprising:
-
a semiconductor processing system comprising a processing chamber; a fluid supply system comprising a pipe connected to the processing chamber and configured to transport a fluid; a power supply comprising an electrical cable connected to processing chamber; a buffer placed on a support plate and adapted to elevate the pipe and the electrical cable from the support plate, the buffer comprising; a base, a plurality of fingers on a first side of the base, wherein the plurality of fingers comprises a first finger extending outwardly from a first end of the base, a second finger extending outwardly from a central portion of the base, and a third finger extending outwardly from a second end of the base opposite the first end, wherein the first finger and the second finger define a first cavity for receiving the pipe, and the second finger and the third finger define a second cavity for receiving the electrical cable, and a roller on a second side of the base opposite the first side and contacting the support plate; and an acoustic sensor adapted to detect acoustic waves generated by the roller. - View Dependent Claims (14, 15, 16, 17, 18)
-
-
19. A method of monitoring wear of a buffer, comprising:
-
providing a buffer to hold a pipe for transporting a fluid and an electrical cable, the buffer separating the pipe and the electrical cable from a support plate and comprising; a base; a plurality of fingers on a first side of the base, wherein the plurality of fingers comprises a first finger extending outwardly from a first end of the base, a second finger extending outwardly from a central portion of the base, and a third finger extending outwardly from a second end of the base opposite the first end, wherein the first finger and the second finger define a first cavity for receiving the pipe, and the second finger and the third finger defines a second cavity for receiving the electrical cable; and a roller on a second side of the base opposite the first side and contacting the support plate; detecting acoustic waves generated by the roller on the support plate; analyzing changes in frequencies of the acoustic waves to determine an extent of the wear of the roller over time; and triggering an alert when an increase in the frequencies of the acoustic waves exceeds a pre-determined threshold value. - View Dependent Claims (20)
-
Specification