SYSTEM FOR REDUCING FRICTION-INDUCED WEAR OF PIPE

• US 20200132227A1
• Filed: 10/07/2019
• Published: 04/30/2020
• Est. Priority Date: 10/31/2018
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: LI, Po Yao, TU, Shao Chang, WU, Tsung-Ying, LIN, Wei Chih
• Granted Patent: US 11,635,347 B2
• Time in Patent Office: Days
• CPC Class Codes: F16L 3/02 partly surrounding the pipes, cables or protective tubing bands or chains F16L3/14
• CPC Class Codes: F16L 3/06 with supports for wires
• CPC Class Codes: F16L 3/16 with special provision allowing movement of the pipe F16L3/01 takes precedence; supporting pipes or cables inside other pipes or sleeves F16L7/00
• CPC Class Codes: G01M 13/045 Acoustic or vibration analysis

Abstract

A buffer for holding a pipe adapted to transport a fluid is provided. The buffer includes a base, a plurality of fingers extending outwardly from a first side of the base. A first finger of the plurality of fingers and a second finger of the plurality of fingers define a cavity for receiving the pipe. The buffer further includes at least one roller on a second side of the base opposite the first side.

Claims

1. A buffer for holding a pipe adapted to transport a fluid, comprising:

a base;

a plurality of fingers extending outwardly from a first side of the base, wherein a first finger of the plurality of fingers and a second finger of the plurality of fingers define a cavity for receiving the pipe; and

at least one roller on a second side of the base opposite the first side.

2. The buffer of claim 1, wherein the first finger has a length less than a length of the second finger.

3. The buffer of claim 1, wherein the second finger comprises a ridge protruding toward the first finger, wherein the ridge defines an open end of the cavity with the first finger.

4. The buffer of claim 1, wherein the first finger extends outwardly from a first end of the base, and the second finger extends outwardly from a central portion of the base.

5. The buffer of claim 4, wherein a third finger of plurality of fingers extends outwardly from a second end of the base opposite the first end, wherein the second finger is between the first finger and the third finger.

6. The buffer of claim 5, wherein the second finger and the third finger have a same length.

7. The buffer of claim 5, wherein the second finger and the third finger have different lengths.

8. The buffer of claim 5, wherein the second finger and the third finger define another cavity for receiving an electrical cable, the another cavity having a dimension less than a dimension of the cavity.

9. The buffer of claim 1, wherein the at least one roller is a universal roller configured to move the buffer in any direction.

10. The buffer of claim 1, wherein the at least one roller comprises a rounded bottom.

11. The buffer of claim 1, wherein the buffer comprises a material having a coefficient of friction less than 0.1.

12. The buffer of claim 1, wherein the buffer comprises polytetrafluoroethylene (PTFE), perfluoroalkoxy (PFA), fluorinated poly ethylene propylene (FPEP), polyvinylidene fluoride (PVDF), polysulfone, or polyether ether ketone (PEEK).

13. An arrangement in a semiconductor fabrication facility, comprising:

a semiconductor processing system comprising a processing chamber;

a fluid supply system comprising a pipe connected to the processing chamber and configured to transport a fluid;

a power supply comprising an electrical cable connected to processing chamber;

a buffer placed on a support plate and adapted to elevate the pipe and the electrical cable from the support plate, the buffer comprising;

a base,

a plurality of fingers on a first side of the base, wherein the plurality of fingers comprises a first finger extending outwardly from a first end of the base, a second finger extending outwardly from a central portion of the base, and a third finger extending outwardly from a second end of the base opposite the first end, wherein the first finger and the second finger define a first cavity for receiving the pipe, and the second finger and the third finger define a second cavity for receiving the electrical cable, and

a roller on a second side of the base opposite the first side and contacting the support plate; and

an acoustic sensor adapted to detect acoustic waves generated by the roller.

14. The arrangement of claim 13, wherein the second finger comprises a ridge protruding towards the first finger, wherein the ridge defines an open end of the first cavity with the first finger.

15. The arrangement of claim 13, wherein the support plate comprises a metal, a wood, or a plywood.

16. The arrangement of claim 13, the buffer comprises a material having a coefficient of friction lower that a coefficient of friction of the support plate.

17. The arrangement of claim 13, wherein the acoustic sensor is an ultrasonic sensor.

18. The arrangement of claim 13, further comprising a sensor control unit adapted to analyze changes in frequencies of the acoustic waves.

19. A method of monitoring wear of a buffer, comprising:

providing a buffer to hold a pipe for transporting a fluid and an electrical cable, the buffer separating the pipe and the electrical cable from a support plate and comprising;

a base;

a plurality of fingers on a first side of the base, wherein the plurality of fingers comprises a first finger extending outwardly from a first end of the base, a second finger extending outwardly from a central portion of the base, and a third finger extending outwardly from a second end of the base opposite the first end, wherein the first finger and the second finger define a first cavity for receiving the pipe, and the second finger and the third finger defines a second cavity for receiving the electrical cable; and

a roller on a second side of the base opposite the first side and contacting the support plate;

detecting acoustic waves generated by the roller on the support plate;

analyzing changes in frequencies of the acoustic waves to determine an extent of the wear of the roller over time; and

triggering an alert when an increase in the frequencies of the acoustic waves exceeds a pre-determined threshold value.

20. The method of claim 19, further comprising replacing the buffer after the alert is triggered.