SURFACE PROPERTY MEASURING DEVICE AND CONTROL METHOD FOR SAME
First Claim
1. A surface property measuring device comprising:
- a surface property measuring instrument that measures a surface property of a measurable surface of a measurable object by performing tracing scanning of the measurable surface while in contact with the measurable surface, the surface property measuring instrument comprising;
a measuring arm capable of circular arced movement with a rotary shaft as a pivot point;
a stylus provided at a distal end of the measuring arma position change detector that detects a change in position due to the circular arced movement of the measuring arm; and
a measurement force applier that biases the measuring arm in a circular arced movement direction and applies a measurement force to the stylus;
a relative displacement motor that relatively displaces the surface property measuring instrument and the measurable object in three dimensions such that the surface property measuring instrument performs tracing scanning along the measurable surface; and
a controller that controls operations of the surface property measuring instrument and the relative displacement motor, the controller comprising;
a central controller comprising a memory that stores a set of executable instructions, and a processor which when executing the instructions, outputs a measurement force instruction that issues an instruction for an orientation and size of the measurement force; and
a measurement force control circuit that controls the orientation and size of the measurement force produced by the measurement force applier by applying a control signal to the measurement force applier, wherein the measurement force control circuit;
sets a predetermined threshold value for a position change speed of the measuring arm in accordance with the measurement speed of the surface property measuring instrument relative to the measurable object,monitors a position change detection signal from the position change detector, and when the position change speed of the measuring arm is equal to or less than the predetermined threshold value, applies the control signal to the measurement force applier so as to produce a measurement force with an orientation and size corresponding to the measurement force instruction, andapplies feedback so as to produce in the measurement force applier a force in a direction that lifts the distal end of the measuring arm upward, when the position change speed of the measuring arm exceeds the predetermined threshold value.
1 Assignment
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Accused Products
Abstract
A surface property measuring device includes a measuring arm that is supported so as to be capable of circular arced movement, a stylus that is provided to a distal end of the measuring arm, a position change detector that detects a change in position of the measuring arm, and a measurement force applier (voice coil motor) that biases the measuring arm in a circular arced movement direction and applies a measurement force. A control device includes a central controller that outputs a measurement force instruction that issues an instruction for an orientation and size of the measurement force, and a measurement force controller that controls the orientation and size of the measurement force produced by the measurement force applier. The measurement force controller monitors a position change detection, and when a position change speed of the measuring arm exceeds a predetermined threshold value, applies feedback.
2 Citations
15 Claims
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1. A surface property measuring device comprising:
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a surface property measuring instrument that measures a surface property of a measurable surface of a measurable object by performing tracing scanning of the measurable surface while in contact with the measurable surface, the surface property measuring instrument comprising; a measuring arm capable of circular arced movement with a rotary shaft as a pivot point; a stylus provided at a distal end of the measuring arm a position change detector that detects a change in position due to the circular arced movement of the measuring arm; and a measurement force applier that biases the measuring arm in a circular arced movement direction and applies a measurement force to the stylus; a relative displacement motor that relatively displaces the surface property measuring instrument and the measurable object in three dimensions such that the surface property measuring instrument performs tracing scanning along the measurable surface; and a controller that controls operations of the surface property measuring instrument and the relative displacement motor, the controller comprising; a central controller comprising a memory that stores a set of executable instructions, and a processor which when executing the instructions, outputs a measurement force instruction that issues an instruction for an orientation and size of the measurement force; and a measurement force control circuit that controls the orientation and size of the measurement force produced by the measurement force applier by applying a control signal to the measurement force applier, wherein the measurement force control circuit; sets a predetermined threshold value for a position change speed of the measuring arm in accordance with the measurement speed of the surface property measuring instrument relative to the measurable object, monitors a position change detection signal from the position change detector, and when the position change speed of the measuring arm is equal to or less than the predetermined threshold value, applies the control signal to the measurement force applier so as to produce a measurement force with an orientation and size corresponding to the measurement force instruction, and applies feedback so as to produce in the measurement force applier a force in a direction that lifts the distal end of the measuring arm upward, when the position change speed of the measuring arm exceeds the predetermined threshold value. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A control method for a surface property measuring device having a surface property measuring instrument having a measuring arm that is supported so as to be capable of circular arced movement with a rotary shaft as a pivot point, a stylus that is provided to a distal end of the measuring arm, a position change detector that detects a change in position due to the circular arced movement of the measuring arm, and a measurement force applier that biases the measuring arm in a circular arced movement direction and applies a measurement force to the stylus, the surface property measuring device further having a relative displacement mechanism that relatively displaces the surface property measuring instrument and a measurable object in three dimensions such that the surface property measuring instrument performs tracing scanning along a measurable surface of the measurable object, the method comprising:
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controlling, via a controller, an orientation and size of the measurement force produced by the measurement force applier by applying to the measurement force applier a control signal that is based on a measurement force instruction that issues an instruction for the orientation and size of the measurement force; setting, via the controller, a predetermined threshold value for a position change speed of the measuring arm in accordance with the measurement speed of the surface property measuring instrument relative to the measurable object; monitoring, via the controller, a position change detection signal from the position change detector; and applying, via the controller, the control signal to the measurement force applier so as to produce a measurement force with an orientation and size corresponding to the measurement force instruction, when the position change speed of the measuring arm is equal to or less than the predetermined threshold value and applying, via the controller, feedback so as to produce in the measurement force applier a force in a direction that lifts the distal end of the measuring arm upward, when the position change speed of the measuring arm exceeds the predetermined threshold value.
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Specification