MASS FLOW CONTROLLER WITH ADVANCED BACK STREAMING DIAGNOSTICS

• US 20200132536A1
• Filed: 10/24/2019
• Published: 04/30/2020
• Est. Priority Date: 10/26/2018
• Status: Active Application

• Current Assignee: Illinois Tool Works Inc.
• Original Assignee: Illinois Tool Works Inc.
• Inventors: SIPKA, Joseph John, BURNHAM, Randy, STAUTS, Adam Paul
• Application Number:
  US16/662,870
• Publication Number:
  US 20200132536A1
• Time in Patent Office: Days
• CPC Class Codes: G01F 1/6842 with means for influencing the fluid flow
• CPC Class Codes: G01F 1/6847 where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
• CPC Class Codes: G01F 15/002 for gases
• CPC Class Codes: G01F 15/003 using electromagnetic, electric or electronic means G01F15/002, G01F15/02 take precedence
• CPC Class Codes: G01F 15/005 Valves valves in general F16K
• CPC Class Codes: G01F 15/043 using electrical means
• CPC Class Codes: G01F 15/046 involving digital counting
• CPC Class Codes: G01F 25/0092 for metering by volume
• CPC Class Codes: G01F 25/10 of flowmeters
• CPC Class Codes: G01F 25/15 specially adapted for gas meters G01F25/11 - G01F25/14, G01F25/17 take precedence
• CPC Class Codes: G01F 5/00 Measuring a proportion of the volume flow
• CPC Class Codes: G05B 21/02 electric
• CPC Class Codes: G05B 23/02 Electric testing or monitoring
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence

Abstract

A diagnostics system comprising a controller for controlling operations of a mass flow controller. The controller is communicable coupled to at least one sensor and to a valve and tuned to control the valve based on a predetermined set point value and communication from the at least one sensor. The controller determines at least one predetermined value associated with a reverse flow of a fluid and either cause the controller to enter a hard fault or a safe state. The predetermined value of the flow is either a percentage of total flow or a percentage of total flow over a time period. The controller can log the date, time, and a device identifier in response to determining the at least one predetermined value. In addition, the diagnostics system can include a centralized controller configured to receive diagnostics data from a plurality of controllers and control operation of the controllers.

Claims

1. A mass flow controller comprising:

an inlet configured to receive fluid;

a flow path in which the fluid passes;

a valve configured to regulate a forward flow of the fluid out of an outlet of the mass flow controller;

at least one sensor configured to monitor fluid through the flow path and valve operations; and

a controller communicable coupled to the at least one sensor and to the valve, the controller tuned to control the valve based on a predetermined set point value and communication from the at least one sensor, the controller further comprises a diagnostics system is configured to;

determine at least one predetermined value associated with a reverse flow of a fluid;

control operation of the controller based on the at least one predetermined value.

2. The mass flow controller of claim 1, wherein the predetermined value of the flow is a percentage of total flow.

3. The mass flow controller of claim 1, wherein the predetermined value of the flow is a percentage of total flow over a period of time.

4. The mass flow controller of claim 1, wherein the diagnostics system is further configured to log the date, time, and a device identifier in response to determining the at least one predetermined value.

5. The mass flow controller of claim 1, wherein the diagnostics system is further configured to cause the controller to enter one of a hard fault and a safe state.

6. The mass flow controller of claim 1, further comprising a centralized controller configured to:

receive diagnostics data from a plurality of controllers; and

control operation of at least one of the plurality of controllers.

7. A diagnostics system for controlling operation of a mass flow controller, the diagnostics system comprising:

a controller communicable coupled to at least one sensor and to a valve, the controller tuned to control the valve based on a predetermined set point value and communication from the at least one sensor, the controller is configured to;

determine at least one predetermined value associated with a reverse flow of a fluid;

control operation of the controller based on the at least one predetermined value.

8. The diagnostics system of claim 7, wherein the predetermined value of the flow is a percentage of total flow.

9. The diagnostics system of claim 7, wherein the predetermined value of the flow is a percentage of total flow over a period of time.

10. The diagnostics system of claim 7, wherein the controller is further configured to log the date, time, and a device identifier in response to determining the at least one predetermined value.

11. The diagnostics system of claim 7, wherein the controller is further configured to cause the controller to enter one of a hard fault and a safe state.

12. The diagnostics system of claim 7, further comprising a centralized controller configured to:

receive diagnostics data from a plurality of controllers; and

control operation of at least one of the plurality of controllers.

13. A method of controlling operation of a mass flow controller, the method comprising:

receiving data from at least one sensor;

controlling a valve based on a predetermined set point value and communication from the at least one sensor;

determining at least one predetermined value associated with a reverse flow of a fluid;

controlling operation of a controller based on the at least one predetermined value.

14. The method of claim 13, wherein the predetermined value of the flow is a percentage of total flow.

15. The method of claim 13, wherein the predetermined value of the flow is a percentage of total flow over a period of time.

16. The method of claim 13, further comprising:

logging the date, time, and a device identifier in response to determining the at least one predetermined value.

17. The method of claim 13, further comprising:

causing the controller to enter one of a hard fault and a safe state.

18. The method of claim 13, further comprising:

receiving, at a centralized controller, diagnostics data from a plurality of controllers; and

controlling operation of at least one of the plurality of controllers.