System and Method for Determining A Particle Contamination
First Claim
1. A system for determining a particle contamination, comprising:
- a detector device for detecting individual particles in a measurement environment of the detector device and generating detection signals in response thereto;
an evaluation device for detection signals of the detector device, which is configured and operableto ascertain at least one estimate of the number of particles per volume in the measurement environment, andto ascertain an output value for the particle contamination in the measurement environment, wherein the output value for the particle contamination is based on the at least one estimate of the number of particles per volume and on characterization information describing at least one particle source in the measurement environment; and
a particle source estimation device that is configured and operable toaccess to context-related data, anduse the context-related data as a basis for estimating the characterization information for the at least one particle source in the measurement environment and making said characterization information available to the evaluation device for ascertaining the output value for the particle contamination.
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Abstract
A system for determining a particle contamination and a method for determining a particle contamination in a measurement environment, is provided in which individual particles in the measurement environment are detected (S1), wherein a) an estimate of the number of particles per volume in the measurement environment is ascertained (S2), b) an estimate of the number of particles per volume and characterization information describing the particle source in the measurement information are taken as a basis for ascertaining an output value for the particle contamination in the measurement environment (S3), and c) context-related data are made available and the characterization information is estimated on the basis of the available context-related data (S4). The estimation of the characterization information on the basis of the available context-related data avoids the conventional restriction of the evaluable characterization information to firmly prescribed information and instead provides flexible adaptation of the characterization information to be evaluated to the context-related data.
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Citations
15 Claims
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1. A system for determining a particle contamination, comprising:
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a detector device for detecting individual particles in a measurement environment of the detector device and generating detection signals in response thereto; an evaluation device for detection signals of the detector device, which is configured and operable to ascertain at least one estimate of the number of particles per volume in the measurement environment, and to ascertain an output value for the particle contamination in the measurement environment, wherein the output value for the particle contamination is based on the at least one estimate of the number of particles per volume and on characterization information describing at least one particle source in the measurement environment; and a particle source estimation device that is configured and operable to access to context-related data, and use the context-related data as a basis for estimating the characterization information for the at least one particle source in the measurement environment and making said characterization information available to the evaluation device for ascertaining the output value for the particle contamination. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 15)
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12. A method for determining a particle contamination in a measurement environment, comprising
detecting individual particles in the measurement environment; -
ascertaining at least one estimate of the number of particles per volume in the measurement environment; and using the at least one estimate of the number of particles per volume and characterization information describing at least one particle source in the measurement environment as a basis for ascertaining an output value for the particle contamination in the measurement environment; wherein context-related data are made available and the characterization information is estimated on the basis of the available context-related data. - View Dependent Claims (13, 14)
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Specification