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System and Method for Determining A Particle Contamination

  • US 20200132582A1
  • Filed: 10/21/2019
  • Published: 04/30/2020
  • Est. Priority Date: 10/26/2018
  • Status: Active Grant
First Claim
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1. A system for determining a particle contamination, comprising:

  • a detector device for detecting individual particles in a measurement environment of the detector device and generating detection signals in response thereto;

    an evaluation device for detection signals of the detector device, which is configured and operableto ascertain at least one estimate of the number of particles per volume in the measurement environment, andto ascertain an output value for the particle contamination in the measurement environment, wherein the output value for the particle contamination is based on the at least one estimate of the number of particles per volume and on characterization information describing at least one particle source in the measurement environment; and

    a particle source estimation device that is configured and operable toaccess to context-related data, anduse the context-related data as a basis for estimating the characterization information for the at least one particle source in the measurement environment and making said characterization information available to the evaluation device for ascertaining the output value for the particle contamination.

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