SCANNING DIFFERENTIAL INTERFERENCE CONTRAST IN AN IMAGING SYSTEM DESIGN

• US 20200132608A1
• Filed: 09/26/2019
• Published: 04/30/2020
• Est. Priority Date: 10/26/2018
• Status: Active Grant

• Current Assignee: KLA Corporation
• Original Assignee: KLA Corporation
• Inventors: Chu, Raymond, Zeng, Andrew, Pettibone, Donald, Huang, Chunsheng, Whiteside, Bret, Paccoret, Fabrice, Wang, Xuan, Huang, Chuanyong, Xu, Steve, Romanovsky, Anatoly
• Granted Patent: US 10,705,026 B2
• Time in Patent Office: Days
• CPC Class Codes: G01N 2021/8825 Separate detection of dark field and bright field
• CPC Class Codes: G01N 2021/8848 Polarisation of light
• CPC Class Codes: G01N 21/8806 Specially adapted optical and illumination features
• CPC Class Codes: G01N 21/9501 Semiconductor wafers manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G02B 27/141 using dichroic mirrors
• CPC Class Codes: G02B 27/283 used for beam splitting or combining
• CPC Class Codes: G02B 27/30 Collimators

Abstract

The inspection system includes an illumination source, a TDI-CCD sensor, and a dark field/bright field sensor. A polarizer receives the light from the light source. The light from the polarizer is directed at a Wollaston prism, such as through a half wave plate. Use of the TDI-CCD sensor and the dark field/bright field sensor provide high spatial resolution, high defect detection sensitivity and signal-to-noise ratio, and fast inspection speed.

Claims

1. An apparatus comprising:

at least one illumination source;

a stage configured to secure a wafer;

a TDI-CCD sensor;

a dark field/bright field sensor;

a field stop in a light path from the illumination source;

a polarizer in the light path, wherein the polarizer is configured to pass P polarized light and reflect S polarized light;

a Wollaston prism in the light path, wherein the Wollaston prism forms the P polarized light and the S polarized light;

a correction lens optic in the light path;

a mirror in the light path that receives the P polarized light and the S polarized light from the Wollaston prism; and

an objective lens assembly in the light path, wherein the correction lens optic, the mirror, and the objective lens assembly are configured to focus the P polarized light and the S polarized light onto the stage, wherein the P polarized light and the S polarized light are separated in a shear direction of the Wollaston prism, and wherein the P polarized light and the S polarized combine at the Wollaston prism.

2. The apparatus of claim 1, wherein the polarizer is a polarizing beam splitter cube.

3. The apparatus of claim 1, wherein the field stop is a controlled variable field stop, wherein a tangential width of the field stop is configured to vary with scanning radius whereby the tangential width at an end of the field stop is larger than at an opposite end of the field stop.

4. The apparatus of claim 1, further comprising a half wave plate in the light path that rotates the P polarized light by 45 degrees.

5. The apparatus of claim 1, wherein the Wollaston prism is oriented with a principle axis at 0 degrees.

6. The apparatus of claim 1, wherein the mirror is a fold mirror.

7. The apparatus of claim 1, wherein the illumination source is a broadband light emitting diode.

8. The apparatus of claim 1, further comprising a dichroic mirror in the light path between the objective lens assembly and the mirror.

9. The apparatus of claim 8, wherein the dichroic mirror directs the S polarized light at the dark field/bright field sensor.

10. The apparatus of claim 1, further comprising a collimating optics assembly in the light path between the field stop and the polarizer.

11. The apparatus of claim 1, wherein the apparatus is configured to provide a differential interference contrast mode.

12. A method comprising:

generating a light beam using an illumination source;

directing the light beam from the illumination source through a field stop;

directing the light beam from the field stop through a polarizer;

directing the light beam from the polarizer to a Wollaston prism;

directing the light beam from the Wollaston prism to a correction lens optic;

directing the light beam from the correction lens optic to a mirror;

directing the light beam toward a wafer on a stage through an objective lens assembly, wherein the correction lens optic, the mirror, and the objective lens assembly are configured to focus P polarized light and S polarized light from the Wollaston prism onto the stage, wherein the P polarized light and the S polarized light are separated in a shear direction of the Wollaston prism;

splitting the light beam reflected from the wafer on the stage with a dichroic mirror into a first light beam and a second light beam;

receiving the first light beam with a dark field/bright field sensor;

combining the P polarized light and the S polarized light of the second light beam at the Wollaston prism; and

receiving the second light beam from the Wollaston prism with a TDI-CCD sensor.

13. The method of claim 12, wherein the polarizer is a polarizing beam splitter cube in the light path, wherein the polarizing beam splitter is configured to pass P polarized light and reflect S polarized light.

14. The method of claim 12, further comprising directing the light beam through a half wave plate that rotates the P polarized light by 45 degrees, wherein the half wave plate is disposed between the polarizer and the Wollaston prism.

15. The method of claim 12, wherein the field stop is a controlled variable field stop, wherein a tangential width of the field stop is configured to vary with scanning radius whereby the tangential width at an end of the field stop is larger than at an opposite end of the field stop.

16. The method of claim 12, wherein the Wollaston prism is oriented with a principle axis at 0 degrees.

17. The method of claim 12, wherein the mirror is a fold mirror.

18. The method of claim 12, wherein the illumination source is a broadband light emitting diode.

19. The method of claim 12, wherein the method is configured to provide a differential interference contrast mode

20. The method of claim 12, further comprising collimating the light beam directed by the field stop using a collimating optics assembly.