Method for Operation of Resonator
First Claim
1. A method of sensing a target analyte in a liquid sample including the steps:
- providing a bulk acoustic wave resonator device;
placing a liquid sample on the bulk acoustic wave resonator device;
operating the bulk acoustic wave resonator device to generate bulk acoustic waves; and
measuring a shift in the fundamental resonant frequency of the bulk acoustic wave resonator device,wherein the bulk acoustic wave resonator device comprises a resonator structure and an acoustic decoupling layer, the resonator structure comprising;
a piezoelectric material layer;
electrodes arranged to apply a driving signal to the piezoelectric material layer to generate bulk acoustic waves; and
a resonator structure surface,wherein;
the resonator structure has a resonator structure acoustic impedance and the liquid sample has a liquid sample acoustic impedance;
the acoustic decoupling layer is formed over the resonator structure surface; and
the acoustic decoupling layer has an acoustic decoupling layer acoustic impedance, the acoustic decoupling layer acoustic impedance being;
up to ⅕
times or not less than 5 times the resonator structure acoustic impedance, andup to ⅕
times or not less than 5 times the liquid sample acoustic impedance.
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Accused Products
Abstract
Disclosed is a method of sensing a target analyte in a liquid sample using a bulk acoustic wave resonator device. The liquid sample is placed on the bulk acoustic wave resonator device which is operated to generate bulk acoustic waves. A shift in the fundamental resonant frequency of the bulk acoustic wave resonator device is measured. The bulk acoustic wave resonator device comprises a resonator structure and an acoustic decoupling layer. The resonator structure comprises: a piezoelectric material layer; electrodes arranged to apply a driving signal to the piezoelectric material layer to generate bulk acoustic waves; and a resonator structure surface. The acoustic decoupling layer is formed over the resonator structure surface. The acoustic decoupling layer acoustic impedance is: up to ⅕ times or not less than 5 times the resonator structure acoustic impedance, and up to ⅕ times or not less than 5 times the liquid sample acoustic impedance.
0 Citations
13 Claims
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1. A method of sensing a target analyte in a liquid sample including the steps:
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providing a bulk acoustic wave resonator device; placing a liquid sample on the bulk acoustic wave resonator device; operating the bulk acoustic wave resonator device to generate bulk acoustic waves; and measuring a shift in the fundamental resonant frequency of the bulk acoustic wave resonator device, wherein the bulk acoustic wave resonator device comprises a resonator structure and an acoustic decoupling layer, the resonator structure comprising; a piezoelectric material layer; electrodes arranged to apply a driving signal to the piezoelectric material layer to generate bulk acoustic waves; and a resonator structure surface, wherein; the resonator structure has a resonator structure acoustic impedance and the liquid sample has a liquid sample acoustic impedance; the acoustic decoupling layer is formed over the resonator structure surface; and the acoustic decoupling layer has an acoustic decoupling layer acoustic impedance, the acoustic decoupling layer acoustic impedance being; up to ⅕
times or not less than 5 times the resonator structure acoustic impedance, andup to ⅕
times or not less than 5 times the liquid sample acoustic impedance.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification