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Method for Operation of Resonator

  • US 20200132633A1
  • Filed: 05/09/2017
  • Published: 04/30/2020
  • Est. Priority Date: 05/09/2017
  • Status: Active Grant
First Claim
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1. A method of sensing a target analyte in a liquid sample including the steps:

  • providing a bulk acoustic wave resonator device;

    placing a liquid sample on the bulk acoustic wave resonator device;

    operating the bulk acoustic wave resonator device to generate bulk acoustic waves; and

    measuring a shift in the fundamental resonant frequency of the bulk acoustic wave resonator device,wherein the bulk acoustic wave resonator device comprises a resonator structure and an acoustic decoupling layer, the resonator structure comprising;

    a piezoelectric material layer;

    electrodes arranged to apply a driving signal to the piezoelectric material layer to generate bulk acoustic waves; and

    a resonator structure surface,wherein;

    the resonator structure has a resonator structure acoustic impedance and the liquid sample has a liquid sample acoustic impedance;

    the acoustic decoupling layer is formed over the resonator structure surface; and

    the acoustic decoupling layer has an acoustic decoupling layer acoustic impedance, the acoustic decoupling layer acoustic impedance being;

    up to ⅕

    times or not less than 5 times the resonator structure acoustic impedance, andup to ⅕

    times or not less than 5 times the liquid sample acoustic impedance.

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