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INERTIAL SENSOR WITH SUSPENSION SPRING STRUCTURE SURROUNDING ANCHOR

  • US 20200132713A1
  • Filed: 10/31/2018
  • Published: 04/30/2020
  • Est. Priority Date: 10/31/2018
  • Status: Active Grant
First Claim
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1. An inertial sensor comprising:

  • a substrate;

    a movable element having an edge; and

    a suspension system retaining the movable element in spaced apart relationship above a surface of the substrate, the suspension system including;

    an anchor attached to the surface of the substrate, the anchor having a first side laterally spaced apart from the edge of the movable element; and

    a spring structure having a first attach point coupled to the first side of the anchor and a second attach point coupled to the edge of the movable element, the spring structure including beam sections serially adjoining one another, the beam sections extending from the first side of the anchor and surrounding the anchor to couple to the edge of the movable element, wherein the spring structure makes no more than one coil around the anchor to position the first attach point in proximity to the second attach point.

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