ACCELERATION SENSOR AND ELECTRONIC APPARATUS
First Claim
1. An acceleration sensor comprising:
- three mutually orthogonal axes being defined as an X-axis, a Y-axis, and a Z-axis;
a base substrate made of glass, the base substrate including;
a recess;
first and second fixed electrodes arranged along the X-axis; and
a conductor disposed on a bottom of the recess;
a sensor member, the sensor member being configured with;
a first member facing the first fixed electrode via a first gap along the Z-axis;
a second member facing the second fixed electrode via a second gap along the Z-axis, the second member having a larger mass than the first member; and
a swing axis that extends along the Y-axis, the swing axis being located between the first member and the second member, the sensor member being swingable with respect to the swing axis,wherein an edge portion of the second member overlaps with the conductor in a plan view along the Z-axis, and the edge portion is located at an opposite side of the second member with respect to the swing axis in a direction along the X-axis,the edge portion has;
first, second, and third sides in the plan view;
the first side extends along the Y-axis;
the second and third sides extend along the X-axis;
the second side is connected to one end of the first side; and
the third side is connected to the other end, which is opposite to the one end, of the first side,the conductor has;
first, second, and third ends in the plan view, the first, second, and third ends are located at positions corresponding to the first, second, and third sides of the edge portion, respectively, in the plan view;
the first end is located outwardly away from the first side of the edge portion along the X-axis in the plan view;
the second end is located outwardly away from the second side of the edge portion along the Y-axis in the plan view; and
the third end is located outwardly away from the third side of the edge portion along the Y-axis in the plan view, andthe sensor member is made of a low-resistance silicon material.
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Accused Products
Abstract
An acceleration sensor includes a base substrate provided with a first recess part, and a sensor part located on the first recess part and swingably supported in a depth direction of the first recess part by a support part, wherein the sensor part is sectioned into a first part and a second part by the support part, includes a movable electrode part in the first part and the second part, a through hole is provided at least at an end side in the second part larger in mass than the first part, and the base substrate includes a fixed electrode part in a position opposed to the movable electrode part in the first recessed part, and a second recess part deeper than the first recess part is provided in a position opposed to the end side of the sensor part.
5 Citations
14 Claims
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1. An acceleration sensor comprising:
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three mutually orthogonal axes being defined as an X-axis, a Y-axis, and a Z-axis; a base substrate made of glass, the base substrate including; a recess; first and second fixed electrodes arranged along the X-axis; and a conductor disposed on a bottom of the recess; a sensor member, the sensor member being configured with; a first member facing the first fixed electrode via a first gap along the Z-axis; a second member facing the second fixed electrode via a second gap along the Z-axis, the second member having a larger mass than the first member; and a swing axis that extends along the Y-axis, the swing axis being located between the first member and the second member, the sensor member being swingable with respect to the swing axis, wherein an edge portion of the second member overlaps with the conductor in a plan view along the Z-axis, and the edge portion is located at an opposite side of the second member with respect to the swing axis in a direction along the X-axis, the edge portion has; first, second, and third sides in the plan view; the first side extends along the Y-axis; the second and third sides extend along the X-axis; the second side is connected to one end of the first side; and the third side is connected to the other end, which is opposite to the one end, of the first side, the conductor has; first, second, and third ends in the plan view, the first, second, and third ends are located at positions corresponding to the first, second, and third sides of the edge portion, respectively, in the plan view; the first end is located outwardly away from the first side of the edge portion along the X-axis in the plan view; the second end is located outwardly away from the second side of the edge portion along the Y-axis in the plan view; and the third end is located outwardly away from the third side of the edge portion along the Y-axis in the plan view, and the sensor member is made of a low-resistance silicon material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification