×

LOW-NOISE MULTI-AXIS ACCELEROMETERS AND RELATED METHODS

  • US 20200132716A1
  • Filed: 10/25/2018
  • Published: 04/30/2020
  • Est. Priority Date: 10/25/2018
  • Status: Active Grant
First Claim
Patent Images

1. A microelectromechanical system (MEMS) accelerometer comprising:

  • a proof mass comprising first and second portions defining a plane and connected to each other by a coupler, wherein, in response to out-of-plane acceleration, the first portion of the proof mass is configured to rotate clockwise relative to an axis and the second portion of the proof mass is configured to rotate counterclockwise relative to the axis;

    a first sensor configured to sense in-plane motion of the proof mass in a first direction; and

    a second sensor configured to sense in-plane motion of the proof mass in a second direction different from the first direction.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×