MICRO-MECHANICAL DEVICE WITH LOCAL ELECTROMAGNETIC ACTUATION

• US 20200132980A1
• Filed: 10/31/2019
• Published: 04/30/2020
• Est. Priority Date: 10/31/2018
• Status: Active Application

• Current Assignee: Sercalo Microtechnology, Ltd.
• Original Assignee: Sercalo Microtechnology, Ltd.
• Inventors: Kuenlin, Vincent, Marxer, Cornel
• Application Number:
  US16/670,837
• Publication Number:
  US 20200132980A1
• Time in Patent Office: Days
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 2203/0154 Torsion bars
• CPC Class Codes: B81B 2203/058 Rotation out of a plane parallel to the substrate
• CPC Class Codes: B81B 2203/06 Devices comprising elements which are movable in relation to each other, e.g. slidable or rotatable
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: H02K 1/12 Stationary parts of the magnetic circuit
• CPC Class Codes: H02K 33/18 with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
• CPC Class Codes: H02K 41/031 of the permanent magnet type

Abstract

A micromechanical device with electromagnetic actuation includes a base and a micro electro mechanical system (MEMS). The MEMS includes a mobile rotating element based on one or two axes of rotation. The base includes stators each forming a first internal pole, an external pole and an air gap. In order to increase the reliability and the mechanical stability of the device, the first internal poles are mounted in a connected manner to each other onto the base.

Claims

1-8. -8. (canceled)

9. A micromechanical device with electromagnetic actuation, comprising:

a base;

a plate;

a micro electro mechanical system (MEMS) mounted indirectly through the plate onto the base, the MEMS comprising a rotating element having a first axis of rotation and a first rotor comprising at least one first conductor line and two first segments detached from the rotating element so as to define two empty spaces internal and external to the first rotor,

two first stators each made up of a first internal pole, a first external pole and a first air gap together defining a magnetic field B, each one of the two first segments arranged in one of the first air gaps perpendicularly to field B, so that the first internal poles and first external poles are placed in the two empty spaces internal to and external to the first rotor,

the first internal poles are mounted in a connected manner to each other onto the base and the MEMS is mounted indirectly through the plate onto the base.

10. The micromechanical device of claim 9, wherein the MEMS is fixed to the base using an intermediary metal plate with a coefficient of thermal expansion close to that of silicon.

11. The micromechanical device of claim 10, wherein the intermediary plate includes essentially rectangular cutouts in a vicinity of welding points that attach the intermediary plate to the base.

12. The micromechanical device of claim 9, wherein:

the rotating element is movable about a second axis of rotation;

the MEMS further comprises a second rotor comprising a second conductor line, and including two second segments detached from the first rotor to define two empty spaces internal to and two empty spaces external to the second rotor,

two second stators each comprising a second internal pole, a second external pole and a second air gap together defining a magnetic field B, each one of the two second segments being arranged in one of the two air gaps perpendicularly to field B, such that the second internal and external poles are placed in the two empty spaces internal and external to the second rotor; and

the first and second internal and external poles are mounted onto the base and are connected to each other.

13. The micromechanical device of claim 12, wherein the first and second internal poles form a single strip.

14. The micromechanical device of claim 12, wherein the first and second stators comprise a magnet attached to the respective first and second internal poles, the respective first and second external poles attached to the magnet to define the first and second air gaps.

15. The micromechanical device of claim 12, wherein the first and second stators comprise a magnet attached to the first and second external poles, the first and second external poles connected respectively to the first and second internal poles.

16. The micromechanical device of claim 12, wherein the first and second internal and external poles are combined with the base, forming a single strip of ferromagnetic material.