MIRROR DRIVING MECHANISM AND OPTICAL MODULE

• US 20200132985A1
• Filed: 03/19/2019
• Published: 04/30/2020
• Est. Priority Date: 05/28/2018
• Status: Active Grant

• Current Assignee: Sumitomo Electric Industries Limited (Sumitomo Corporation)
• Original Assignee: Sumitomo Electric Industries Limited (Sumitomo Corporation)
• Inventors: ENYA, Yohei, ITO, Shinya, KYONO, Takashi
• Granted Patent: US 11,609,423 B2
• Time in Patent Office: Days
• CPC Class Codes: B81B 3/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes B81B5/00 takes precedence
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means
• CPC Class Codes: G02B 26/105 with one or more pivoting mirrors or galvano-mirrors G02B26/101 takes precedence
• CPC Class Codes: G02B 27/0966 Cylindrical lenses cylindrical lenses per se G02B3/06
• CPC Class Codes: H01S 5/022 Mountings; Housings
• CPC Class Codes: H01S 5/02216 Butterfly-type, i.e. with electrode pins extending horizontally from the housings
• CPC Class Codes: H01S 5/02255 using beam deflecting elements
• CPC Class Codes: H01S 5/02325 Mechanically integrated components on mount members or optical micro-benches
• CPC Class Codes: H01S 5/02446 Cooling being separate from the laser chip cooling
• CPC Class Codes: H01S 5/06804 by monitoring an external parameter, e.g. temperature
• CPC Class Codes: H01S 5/0683 by monitoring the optical output parameters
• CPC Class Codes: H01S 5/4093 Red, green and blue [RGB] generated directly by laser action or by a combination of laser action with nonlinear frequency conversion
• CPC Class Codes: H04N 5/74 Projection arrangements for image reproduction, e.g. using eidophor
• CPC Class Codes: H04N 9/31 Projection devices for colour picture display , e.g. using electronic spatial light modulators [ESLM]

Abstract

A mirror driving mechanism includes a plate-shaped base portion, a mirror that is installed at the base portion, and a temperature detecting section that is installed at the base portion and that detects a temperature of the base portion. The base portion includes a thin portion that is disposed away from an outer edge of the base portion and that has a through hole extending through the base portion in a plate-thickness direction of the base portion, a thick portion that is connected to the thin portion, that is thicker than the thin portion in the plate-thickness direction of the base portion, and that extends along the outer edge so as to surround the thin portion, and a first shaft portion extends into the through hole from an outer periphery of the through hole.

Claims

1. A mirror driving mechanism comprising:

a plate-shaped base portion;

a mirror that is installed at the base portion; and

a temperature detecting section that is installed at the base portion and that detects a temperature of the base portion,

wherein the base portion includes

a thin portion that is disposed away from an outer edge of the base portion and that has a through hole extending through the base portion in a plate-thickness direction of the base portion,

a thick portion that is connected to the thin portion, that is thicker than the thin portion in the plate-thickness direction of the base portion, and that extends along the outer edge so as to surround the thin portion, and

a first shaft portion that extends into the through hole from an outer periphery of the through hole, and

wherein the mirror is supported by the first shaft portion so as to be swingable due to resonance with respect to the thin portion with the first shaft portion being a swing axis.

2. The mirror driving mechanism according to claim 1, wherein the temperature detecting section is installed at the thick portion.

3. The mirror driving mechanism according to claim 1, wherein the temperature detecting section is installed at the thin portion.

4. The mirror driving mechanism according to claim 3, wherein the thin portion includes

a first portion that is connected to the thick portion, and

a second portion that is connected to the first portion and that has the through hole, and

wherein the temperature detecting section is installed at the second portion.

5. The mirror driving mechanism according to claim 4, wherein the base portion further includes

a second shaft portion that extends in a direction orthogonal to the first shaft portion and that connects the first portion and the second portion to each other, and

wherein the second portion is supported by the second shaft portion so as to be swingable with respect to the first portion with the second shaft portion being a swing axis.

6. The mirror driving mechanism according to claim 5, wherein the second portion is swingable due to a piezoelectric phenomenon with the second shaft portion being the swing axis.

7. The mirror driving mechanism according to claim 1, wherein the mirror is swingable due to a piezoelectric phenomenon with the first shaft portion being the swing axis.

8. The mirror driving mechanism according to claim 1, wherein the thin portion includes

a silicon layer, and

a piezoelectric element that is disposed on the silicon layer, and

wherein the temperature detecting section is a silicon diode that is disposed on the silicon layer.

9. The mirror driving mechanism according to claim 1, further comprising:

a first electronic temperature adjusting module that adjusts a temperature of the mirror driving mechanism by controlling an output based on a signal from the temperature detecting section.

10. An optical module comprising:

the mirror driving mechanism according to claim 1; and

a laser diode that emits a light ray with which scanning is performed by driving the mirror.

11. The optical module according to claim 10, further comprising:

a base member where the laser diode is installed; and

a second electronic temperature adjusting module that adjusts a temperature of the base member.

12. The optical module according to claim 10, further comprising:

a beam shaping section that shapes, in a cross section perpendicular to a direction of propagation of the light ray that is emitted from the laser diode, the light ray that is emitted from the laser diode.

13. The optical module according to claim 10, further comprising:

a light-receiving element that receives the light ray that is emitted from the laser diode.

14. The optical module according to claim 10, further comprising:

a lens that converts a spot size of the light ray that is emitted from the laser diode.

15. The optical module according to claim 10, wherein a plurality of the laser diodes are provided,

wherein the optical module further comprises a filter that combines a plurality of the light rays that are emitted from the plurality of laser diodes, and

wherein the plurality of laser diodes include

a red laser diode that emits a red light ray,

a green laser diode that emits a green light ray, and

a blue laser diode that emits a blue light ray.

16. The optical module according to claim 11, further comprising:

a beam shaping section that shapes, in a cross section perpendicular to a direction of propagation of the light ray that is emitted from the laser diode, the light ray that is emitted from the laser diode.

17. The optical module according to claim 11, wherein a plurality of the laser diodes are provided,

wherein the optical module further comprises a filter that combines a plurality of the light rays that are emitted from the plurality of laser diodes, and

wherein the plurality of laser diodes include

a red laser diode that emits a red light ray,

a green laser diode that emits a green light ray, and

a blue laser diode that emits a blue light ray.

18. The optical module according to claim 12, wherein a plurality of the laser diodes are provided,

wherein the optical module further comprises a filter that combines a plurality of the light rays that are emitted from the plurality of laser diodes, and

wherein the plurality of laser diodes include

a red laser diode that emits a red light ray,

a green laser diode that emits a green light ray, and

a blue laser diode that emits a blue light ray.

19. The optical module according to claim 13, wherein a plurality of the laser diodes are provided,

wherein the optical module further comprises a filter that combines a plurality of the light rays that are emitted from the plurality of laser diodes, and

wherein the plurality of laser diodes include

a red laser diode that emits a red light ray,

a green laser diode that emits a green light ray, and

a blue laser diode that emits a blue light ray.

20. The optical module according to claim 14, wherein a plurality of the laser diodes are provided,

wherein the optical module further comprises a filter that combines a plurality of the light rays that are emitted from the plurality of laser diodes, and

wherein the plurality of laser diodes include

a red laser diode that emits a red light ray,

a green laser diode that emits a green light ray, and

a blue laser diode that emits a blue light ray.