EMBEDDED TRANSMISSIVE DIFFRACTIVE OPTICAL ELEMENTS
First Claim
1. A lens, comprising:
- a substrate;
a first immersion material layer on the substrate; and
a plurality of anti-reflective phase shift layers on the first immersion material layer, the phase shift layers defining;
a first anti-reflective phase shift region configured to transmit received light without a phase shift;
a second anti-reflective phase shift region configured to transmit the received light with a first phase shift;
a third anti-reflective phase shift region configured to transmit the received light with a second phase shift; and
a fourth anti-reflective phase shift region configured to transmit the received light with a third phase shift, the first, second, and third phase shifts being different from one another.
2 Assignments
0 Petitions
Accused Products
Abstract
Various embodiments provide optical lenses that include phase shift layers that transmit incident light with four or more distinct phase quantizations. In one embodiment, a lens includes a substrate, a first immersion material layer on the substrate, and a plurality of anti-reflective phase shift layers on the first immersion material layer. The phase shift layers define a first anti-reflective phase shift region that transmits received light without a phase shift, a second anti-reflective phase shift region configured to transmit the received light with a first phase shift, a third anti-reflective phase shift region configured to transmit the received light with a second phase shift, and a fourth anti-reflective phase shift region configured to transmit the received light with a third phase shift. The first, second, and third phase shifts are different from one another.
2 Citations
21 Claims
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1. A lens, comprising:
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a substrate; a first immersion material layer on the substrate; and a plurality of anti-reflective phase shift layers on the first immersion material layer, the phase shift layers defining; a first anti-reflective phase shift region configured to transmit received light without a phase shift; a second anti-reflective phase shift region configured to transmit the received light with a first phase shift; a third anti-reflective phase shift region configured to transmit the received light with a second phase shift; and a fourth anti-reflective phase shift region configured to transmit the received light with a third phase shift, the first, second, and third phase shifts being different from one another. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A lens, comprising:
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an immersion material layer having opposite first and second surfaces; and a plurality of anti-reflective phase shift layers embedded in the immersion material layer between the first and second surfaces, portions of the immersion material layer extending between adjacent ones of the plurality of anti-reflective phase shift layers, the lens including; a first anti-reflective phase shift region configured to transmit received light without a phase shift; a second anti-reflective phase shift region configured to transmit the received light with a first phase shift; a third anti-reflective phase shift region configured to transmit the received light with a second phase shift; and a fourth anti-reflective phase shift region configured to transmit the received light with a third phase shift, the first, second, third, and fourth phase shifts being different from one another. - View Dependent Claims (14, 15, 16, 17, 18)
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19. A lens, comprising:
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a substrate; a first immersion material layer on the substrate; a first anti-reflective layer on the first immersion layer; a second anti-reflective layer; a second immersion material layer on the second anti-reflective layer; and a phase shift layer between the first and second anti-reflective layers, the phase shift layer including; a plurality of portions of a first material, at least two of the portions of the first material having different widths; and a plurality of portions of a second material, at least two of the portions of the second material having different widths, the portions of the first and second materials being alternately disposed in a width direction of the phase shift layer. - View Dependent Claims (20, 21)
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Specification