DIFFRACTIVE OPTICAL ELEMENT MODULE
First Claim
1. A diffractive optical element (DOE) module comprising:
- a transparent substrate;
a first electrode disposed on the transparent substrate;
a second electrode disposed on the transparent substrate;
a first sensing wire distributed on the transparent substrate and electrically connected to the first electrode;
a sensing layer distributed on the transparent substrate and electrically connected to the second electrode, wherein the first sensing wire is insulated from the sensing layer to form a capacitance between the first sensing wire and the sensing layer;
a DOE layer disposed on the transparent substrate; and
an insulating layer covering the first sensing wire and the sensing layer, the insulating layer having a first opening and a second opening respectively exposing the first electrode and the second electrode.
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Abstract
A DOE module including a transparent substrate, a first electrode, a second electrode, a first sensing wire, a sensing layer, a DOE layer, and an insulating layer is provided. The first electrode is disposed on the transparent substrate, and the second electrode is disposed on the transparent substrate. The first sensing wire is distributed on the transparent substrate and electrically connected to the first electrode. The sensing layer is distributed on the transparent substrate and electrically connected to the second electrode. The first sensing wire is insulated from the sensing layer to form a capacitance between the first sensing wire and the sensing layer. The DOE layer is disposed on the transparent substrate. The insulating layer covers the first sensing wire and the sensing layer. The insulating layer has a first opening and a second opening respectively exposing the first electrode and the second electrode.
2 Citations
23 Claims
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1. A diffractive optical element (DOE) module comprising:
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a transparent substrate; a first electrode disposed on the transparent substrate; a second electrode disposed on the transparent substrate; a first sensing wire distributed on the transparent substrate and electrically connected to the first electrode; a sensing layer distributed on the transparent substrate and electrically connected to the second electrode, wherein the first sensing wire is insulated from the sensing layer to form a capacitance between the first sensing wire and the sensing layer; a DOE layer disposed on the transparent substrate; and an insulating layer covering the first sensing wire and the sensing layer, the insulating layer having a first opening and a second opening respectively exposing the first electrode and the second electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A diffractive optical element (DOE) module comprising:
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a transparent substrate; a first electrode disposed on the transparent substrate; a second electrode disposed on the transparent substrate; a first sensing wire distributed on the transparent substrate and electrically connected to the first electrode; a sensing layer distributed on the transparent substrate and electrically connected to the second electrode, wherein the first sensing wire is insulated from the sensing layer to form a capacitance between the first sensing wire and the sensing layer; and a DOE layer covering the first sensing wire and the sensing layer, the DOE layer having a first opening and a second opening respectively exposing the first electrode and the second electrode. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification