ELECTRO-OPTICAL DEVICE, METHOD FOR MANUFACTURING ELECTRO-OPTICAL DEVICE, AND MEMBER FOR MANUFACTURING ELECTRO-OPTICAL DEVICE

• US 20200133056A1
• Filed: 10/25/2019
• Published: 04/30/2020
• Est. Priority Date: 10/26/2018
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: ITO, Satoshi
• Granted Patent: US 10,884,286 B2
• Time in Patent Office: Days
• CPC Class Codes: G02B 27/0955 Lenses lenses per se G02B3/00
• CPC Class Codes: G02B 3/0012 characterised by the manufacturing method
• CPC Class Codes: G02B 3/0075 characterized by non-optical structures, e.g. having integrated holding or alignment means
• CPC Class Codes: G02F 1/133345 Insulating layers G02F1/1335, G02F1/1337, G02F1/135, G02F1/136 take precedence
• CPC Class Codes: G02F 1/133526 Lenses, e.g. microlenses or Fresnel lenses
• CPC Class Codes: G02F 1/13439 characterised by their electrical, optical, physical properties; materials therefor; method of making
• CPC Class Codes: G02F 1/13629 Multilayer wirings

Abstract

An electro-optical device includes a transmissive substrate, a lens surface, a transmissive lens layer, an optical path adjustment layer that adjusts an optical path length of light passing through the lens surface, a wiring layer that includes a transmissive light transmitting portion and a wiring portion including wiring and that is disposed in contact with the optical path adjustment layer on an opposite side of the optical path adjustment layer from the lens layer, a transmissive pixel electrode disposed on an opposite side of the wiring layer from the optical path adjustment layer and overlapping the light transmitting portion in plan view, a first mark disposed between the substrate and the optical path adjustment layer and being in contact with the substrate, and a second mark disposed between the optical path adjustment layer and the wiring layer and being in contact with the optical path adjustment layer.

Claims

1. An electro-optical device comprising:

a transmissive substrate including a lens surface having a concave curved surface shape;

a transmissive lens layer disposed at the substrate and in contact with the lens surface;

an optical path adjustment layer disposed on an opposite side of the lens layer from the lens surface and configured to adjust an optical path length of light passing through the lens surface;

a wiring layer including a transmissive light transmitting portion and a wiring portion that includes wiring disposed around the light transmitting portion in plan view from a thickness direction of the substrate, the wiring layer being disposed in contact with the optical path adjustment layer on an opposite side of the optical path adjustment layer from the lens layer;

a transmissive pixel electrode disposed on an opposite side of the wiring layer from the optical path adjustment layer, the pixel electrode overlapping the light transmitting portion in plan view and being electrically coupled to the wiring;

a first mark disposed between the substrate and the optical path adjustment layer and being in contact with the substrate; and

a second mark disposed between the optical path adjustment layer and the wiring layer and being in contact with the optical path adjustment layer.

2. The electro-optical device according to claim 1, wherein

the substrate includes a first concave portion, and the lens surface is provided at a bottom surface of the first concave portion.

3. The electro-optical device according to claim 1, wherein

a thickness of the optical path adjustment layer is from 2 to 30 μ

m.

4. The electro-optical device according to claim 1, wherein

a light transmittance of the first mark is lower than a light transmittance of the substrate, and

a light transmittance of the second mark is lower than a light transmittance of the light transmitting portion.

5. The electro-optical device according to claim 4, wherein

the first mark includes silicon or silicon oxynitride.

6. The electro-optical device according to claim 1, wherein

the first mark protrudes from the substrate toward the optical path adjustment layer, and

the second mark protrudes from the optical path adjustment layer toward the wiring layer.

7. The electro-optical device according to claim 1, wherein

the substrate includes a second concave portion provided at a surface of the substrate on the lens layer side, and

the first mark is disposed at the second concave portion.

8. The electro-optical device according to claim 1, further comprising:

a transmissive protective layer disposed between the lens layer and the optical path adjustment layer and configured to protect the lens layer, wherein

a third mark is disposed on the optical path adjustment layer side of the protective layer and is in contact with the protective layer.

9. The electro-optical device according to claim 8, wherein

the third mark overlaps the first mark in plan view.

10. A method for manufacturing an electro-optical device, the method comprising:

forming a first mark in contact with a transmissive substrate;

forming a lens surface having a concave curved surface shape at a surface side of the substrate at which the first mark is formed;

forming a transmissive lens layer on the lens surface;

forming an optical path adjustment layer on an opposite side of the lens layer from the lens surface, the optical path adjustment layer being configured to adjust an optical path length of light passing through the lens surface;

forming a wiring layer including a light transmitting portion through which light passes, and a wiring portion that includes wiring disposed around the light transmitting portion in plan view from a thickness direction of the substrate, the wiring layer being formed on an opposite side of the optical path adjustment layer from the lens layer and being in contact with the optical path adjustment layer;

forming a second mark in contact with the optical path adjustment layer on an opposite side of the optical path adjustment layer from the substrate; and

forming a transmissive pixel electrode on an opposite side of the wiring layer from the optical path adjustment layer, the pixel electrode overlapping the light transmitting portion in plan view and being electrically coupled to the wiring.

11. A member for manufacturing an electro-optical device, the member comprising:

a transmissive substrate including a first surface, a second surface, and a side surface connecting the first surface and the second surface, and a lens surface at the first surface;

a transmissive lens layer disposed at the first surface and in contact with the lens surface;

an optical path adjustment layer disposed on an opposite side of the lens layer from the lens surface and configured to adjust an optical path length of light passing through the lens surface;

a wiring layer including a transmissive light transmitting portion and a wiring portion that includes wiring disposed around the light transmitting portion in plan view from a thickness direction of the substrate, the wiring layer being disposed in contact with the optical path adjustment layer on an opposite side of the optical path adjustment layer from the lens layer;

a transmissive pixel electrode disposed on an opposite side of the wiring layer from the optical path adjustment layer, the pixel electrode overlapping the light transmitting portion in plan view and being electrically coupled to the wiring;

a first mark disposed between the substrate and the optical path adjustment layer and being in contact with the substrate; and

a second mark disposed between the optical path adjustment layer and the wiring layer and being in contact with the optical path adjustment layer.