SUPERSTRATE AND METHODS OF USING THE SAME
First Claim
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1. A superstrate comprising:
- a body having a first diameter, a first side, and a second side opposite the first side; and
a mesa on the first side of the body, wherein the mesa has a second diameter, wherein a center point of the first diameter of the body is different from a center point of the second diameter of the mesa.
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Abstract
An apparatus may include a superstrate. The superstrate may have a body with a first side, a second side opposite the first side, and a first diameter. The superstrate may also include a mesa on the first side of the body. The mesa may have a second diameter. The center point of the body can be different from the center point of the mesa.
8 Citations
20 Claims
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1. A superstrate comprising:
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a body having a first diameter, a first side, and a second side opposite the first side; and a mesa on the first side of the body, wherein the mesa has a second diameter, wherein a center point of the first diameter of the body is different from a center point of the second diameter of the mesa. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A planarization apparatus comprising:
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a superstrate comprising; a body having a first diameter, a first side, and a second side opposite the first side; and a mesa on the first side of the body, wherein the mesa has a second diameter, wherein a center point of the first diameter of the body is different from a center point of the second diameter of the mesa; and a superstrate holder configured to hold the superstrate. - View Dependent Claims (12, 13, 14, 15)
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16. A method of forming a planarization layer, comprising:
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depositing a formable material on a substrate, the substrate comprising a center point; aligning a superstrate with the substrate, the superstrate comprising; a body having a first diameter, a first side, and a second side opposite the first side; and a mesa on the first side of the body, wherein the mesa has a second diameter, and wherein a center point of the first diameter of the body is different from a center point of the second diameter of the mesa; and an exclusion region, wherein the exclusion region is an area between an outer edge of the mesa and an outer edge of the body; and contacting the mesa with the substrate. - View Dependent Claims (17, 18, 19, 20)
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Specification