IMPRINT APPARATUS CONTROL, CONTROL METHOD AND MANUFACTURING METHOD
First Claim
1. An apparatus comprising:
- a mount attached to a fixed surface;
a movable plate movable relative to the mount and configured to hold and move an imprint template or superstrate;
at least one electromagnetic actuator with a first electrical terminal and a second electrical terminal, mounted between the movable plate and the mount,wherein an electrical current is applied to the at least one electromagnetic actuator for controlling movement of the moveable plate;
an inductance serially connected at the first electrical terminal of the at least one electromagnetic actuator to control the electrical current; and
at least one switch serially connectable to the second electrical terminal of the at least one electromagnetic actuator and a terminal of the inductance, to switch between a state where the inductance acts upon the at least one electromagnetic actuator or a state where the inductance does not act upon the at least one electromagnetic actuator.
1 Assignment
0 Petitions
Accused Products
Abstract
An apparatus and method configured to brake and/or dampen an imprint head. The apparatus and method includes a mount attached to a fixed surface, a movable plate movable relative to the mount and configured to hold and move an imprint template or superstrate, at least one electromagnetic actuator with a first electrical terminal and a second electrical terminal, mounted between the movable plate and the mount, wherein an electrical current is applied to the at least one electromagnetic actuator for controlling movement of the moveable plate, an inductance serially connected at the first electrical terminal of the at least one electromagnetic actuator to control the electrical current, and at least one switch serially connectable to the second terminal of the at least one electromagnetic actuator and a terminal of the inductance to switch between a state where the inductance acts upon the at least one electromagnetic actuator or a state where the inductance does not act upon the at least one electromagnetic actuator.
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Citations
14 Claims
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1. An apparatus comprising:
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a mount attached to a fixed surface; a movable plate movable relative to the mount and configured to hold and move an imprint template or superstrate; at least one electromagnetic actuator with a first electrical terminal and a second electrical terminal, mounted between the movable plate and the mount, wherein an electrical current is applied to the at least one electromagnetic actuator for controlling movement of the moveable plate; an inductance serially connected at the first electrical terminal of the at least one electromagnetic actuator to control the electrical current; and at least one switch serially connectable to the second electrical terminal of the at least one electromagnetic actuator and a terminal of the inductance, to switch between a state where the inductance acts upon the at least one electromagnetic actuator or a state where the inductance does not act upon the at least one electromagnetic actuator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 13, 14)
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8. A method for controlling an apparatus including, a mount attached to a fixed surface, a movable plate movable relative to the mount and configured to hold and move an imprint template or superstrate and at least one electromagnetic actuator mounted between the movable plate and mount, an inductance serially connected at a first electrical terminal of the at least one electromagnetic actuator to control the electrical current, and at least one switch serially connectable to a second electrical terminal of the at least one electromagnetic actuator and a terminal of the inductance to switch between a state where the inductance acts upon the at least one electromagnetic actuator or a state where the inductance does not act upon the at least one electromagnetic actuator, comprising:
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controlling an electrical current to the at least one electromagnetic actuator for controlling movement of the moveable plate, wherein in the controlling of the electrical current, the at least one switch controls whether the at least one electromagnetic actuator is connected to the inductance. - View Dependent Claims (9, 10, 11, 12)
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Specification