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IMPRINT APPARATUS CONTROL, CONTROL METHOD AND MANUFACTURING METHOD

  • US 20200133120A1
  • Filed: 10/31/2018
  • Published: 04/30/2020
  • Est. Priority Date: 10/31/2018
  • Status: Active Grant
First Claim
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1. An apparatus comprising:

  • a mount attached to a fixed surface;

    a movable plate movable relative to the mount and configured to hold and move an imprint template or superstrate;

    at least one electromagnetic actuator with a first electrical terminal and a second electrical terminal, mounted between the movable plate and the mount,wherein an electrical current is applied to the at least one electromagnetic actuator for controlling movement of the moveable plate;

    an inductance serially connected at the first electrical terminal of the at least one electromagnetic actuator to control the electrical current; and

    at least one switch serially connectable to the second electrical terminal of the at least one electromagnetic actuator and a terminal of the inductance, to switch between a state where the inductance acts upon the at least one electromagnetic actuator or a state where the inductance does not act upon the at least one electromagnetic actuator.

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