IMPRINT APPARATUS CONTROL, CONTROL METHOD AND MANUFACTURING METHOD

• US 20200133120A1
• Filed: 10/31/2018
• Published: 04/30/2020
• Est. Priority Date: 10/31/2018
• Status: Active Grant

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Khusnatdinov, Niyaz, Meissl, Mario Johannes
• Granted Patent: US 11,073,758 B2
• Time in Patent Office: Days
• CPC Class Codes: B29C 43/58 Measuring, controlling or regulating for bank adjustment in calendering B29C43/245
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Abstract

An apparatus and method configured to brake and/or dampen an imprint head. The apparatus and method includes a mount attached to a fixed surface, a movable plate movable relative to the mount and configured to hold and move an imprint template or superstrate, at least one electromagnetic actuator with a first electrical terminal and a second electrical terminal, mounted between the movable plate and the mount, wherein an electrical current is applied to the at least one electromagnetic actuator for controlling movement of the moveable plate, an inductance serially connected at the first electrical terminal of the at least one electromagnetic actuator to control the electrical current, and at least one switch serially connectable to the second terminal of the at least one electromagnetic actuator and a terminal of the inductance to switch between a state where the inductance acts upon the at least one electromagnetic actuator or a state where the inductance does not act upon the at least one electromagnetic actuator.

Claims

1. An apparatus comprising:

a mount attached to a fixed surface;

a movable plate movable relative to the mount and configured to hold and move an imprint template or superstrate;

at least one electromagnetic actuator with a first electrical terminal and a second electrical terminal, mounted between the movable plate and the mount,

wherein an electrical current is applied to the at least one electromagnetic actuator for controlling movement of the moveable plate;

an inductance serially connected at the first electrical terminal of the at least one electromagnetic actuator to control the electrical current; and

at least one switch serially connectable to the second electrical terminal of the at least one electromagnetic actuator and a terminal of the inductance, to switch between a state where the inductance acts upon the at least one electromagnetic actuator or a state where the inductance does not act upon the at least one electromagnetic actuator.

2. The apparatus according to claim 1, further comprising:

at least one resistance serially connected between the inductance and the first electrical terminal of the at least one electromagnetic actuator.

3. The apparatus according to claim 2, further comprising:

at least one current source parallelly connected to the at least one resistance.

4. The apparatus according to claim 1, wherein the at least one switch connects the inductance to the at least one electromagnetic actuator, prior to a state where power is not supplied to the imprinting apparatus.

5. The apparatus according to claim 1, wherein the at least one switch connects the inductance to the at least one electromagnetic actuator, when power is not supplied to the imprinting apparatus.

6. The apparatus according to claim 1, wherein an electromagnetic relay is configured as the at least one switch.

7. The apparatus according to claim 1, wherein the at least one switch is electronically controlled by a processor.

13. The apparatus according to claim 1, wherein the movable plate holds and moves an imprint template.

14. The apparatus according to claim 1, wherein the movable plate holds and moves a superstrate.

8. A method for controlling an apparatus including, a mount attached to a fixed surface, a movable plate movable relative to the mount and configured to hold and move an imprint template or superstrate and at least one electromagnetic actuator mounted between the movable plate and mount, an inductance serially connected at a first electrical terminal of the at least one electromagnetic actuator to control the electrical current, and at least one switch serially connectable to a second electrical terminal of the at least one electromagnetic actuator and a terminal of the inductance to switch between a state where the inductance acts upon the at least one electromagnetic actuator or a state where the inductance does not act upon the at least one electromagnetic actuator, comprising:

controlling an electrical current to the at least one electromagnetic actuator for controlling movement of the moveable plate,

wherein in the controlling of the electrical current, the at least one switch controls whether the at least one electromagnetic actuator is connected to the inductance.

9. The method according to claim 8, wherein when power is not delivered to the imprinting apparatus, the at least one switch is closed to connect the inductance to the at least one electromagnetic actuator.

10. The method according to claim 8, wherein the switch is manually controlled by a user of the imprinting apparatus.

11. The method according to claim 8, wherein when power is not supplied to the imprinting apparatus an electromagnetic relay is configured to switch the at least one switch to a position where the inductance acts upon the at least one electromagnetic actuator.

12. A method of manufacturing an article, the method comprising:

forming a pattern on a substrate while controlling an apparatus using a control method according to claim 8; and

processing the substrate on which the pattern has been formed to obtain the article.