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METHOD FOR IMPROVING EXPOSURE PERFORMANCE AND APPARATUS THEREOF

  • US 20200133142A1
  • Filed: 05/02/2019
  • Published: 04/30/2020
  • Est. Priority Date: 10/31/2018
  • Status: Active Grant
First Claim
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1. A method of operating an illuminator, comprising:

  • directing a radiation beam to the illuminator comprising slit fingers;

    sensing a temperature value of each of the slit fingers;

    determining a shifting value of the respective slit finger based on the temperature value;

    causing the respective slit finger to move according to the shifting value to form a light slit from the radiation beam; and

    exposing a workpiece using the light slit.

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