TOUCH SENSOR WITH ENHANCED AND SMALL-SCALE SENSITIVITY AND METHOD FOR MAKING SAME
First Claim
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1. A touch sensor, comprising:
- a substrate;
a piezoelectric layer located on the substrate;
a first electrode layer located between the substrate and the piezoelectric layer;
a second electrode layer located on a side of the piezoelectric layer away from the substrate; and
a touch layer located on a side of the second electrode layer away from the piezoelectric layer, wherein the touch layer being made of a flexible and deformable material, comprising a base layer covering the second electrode layer and a plurality of protrusions protruding from a surface of the base layer away from the piezoelectric layer, and the base layer and the plurality of protrusions are integrally formed.
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Abstract
A touch sensor with enhanced and small-scale sensitivity includes a substrate, a piezoelectric layer on the substrate, a first electrode layer between the substrate and the piezoelectric layer, a second electrode layer on the piezoelectric layer, and an outer touch layer. The touch layer is made of flexible and deformable material. The touch layer includes a base layer covering the second electrode layer and finely-shaped protrusions protruding from a surface of the base layer away from the piezoelectric layer. The base layer and the protrusions are integrally formed. The disclosure also provides a method for making such touch sensor.
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Citations
15 Claims
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1. A touch sensor, comprising:
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a substrate; a piezoelectric layer located on the substrate; a first electrode layer located between the substrate and the piezoelectric layer; a second electrode layer located on a side of the piezoelectric layer away from the substrate; and a touch layer located on a side of the second electrode layer away from the piezoelectric layer, wherein the touch layer being made of a flexible and deformable material, comprising a base layer covering the second electrode layer and a plurality of protrusions protruding from a surface of the base layer away from the piezoelectric layer, and the base layer and the plurality of protrusions are integrally formed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of making a touch sensor, comprising:
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preparing a touch layer of a flexible and deformable material, the touch layer comprising a base layer and a plurality of protrusions protruding from a surface of the base layer, the base layer and the plurality of protrusions being integrally formed; forming a substrate, a first electrode layer, a piezoelectric layer, and a second electrode layer sequentially on a carrier film; and attaching the touch layer to the second electrode layer, and peeling off the carrier film from the substrate. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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Specification