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SMART METROLOGY ON MICROSCOPE IMAGES

  • US 20200134824A1
  • Filed: 10/31/2018
  • Published: 04/30/2020
  • Est. Priority Date: 10/31/2018
  • Status: Active Grant
First Claim
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1. A method comprising:

  • extracting a region of interest from an image, the region including one or more boundaries between different sections of the region of interest;

    enhancing at least the extracted region of interest based on one or more filters;

    generating a multi-scale data set of the region of interest based on the enhanced region of interest;

    initializing a model of the region of interest, the initialized model determining at least first and second bounds of the region of interest;

    optimizing a plurality of active contours within the enhanced region of interest based on the model of the region of interest and further based on the multi-scale data set, the optimized plurality of active contours identifying the one or more boundaries within the region of interest; and

    performing metrology on the region of interest based on the identified boundaries.

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