MOVEABLE DETECTOR
First Claim
1. An apparatus (100) for detecting characteristics of a probe, wherein the apparatus (100) comprises:
- a vacuum chamber (104),a beam generator (102), adapted to generate a beam of charged particles within the vacuum chamber (104), wherein interaction particles and/or interaction radiation are generated when the beam of charged particles falls onto the probe;
an electromechanical unit (114) within the vacuum chamber (104);
a detector (110) comprising a plurality of detection units and being arranged on the electromechanical unit (114), wherein the electromechanical unit (114) allowing for the detector (110) to move from a first position (302) with respect to the beam generator (102) to a second position (304) with respect to the beam generator (102) and vice versa, upon a corresponding actuation of the electromechanical unit (114) performable from outside of the vacuum chamber (104).
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Accused Products
Abstract
The present invention refers to an apparatus (100) and a method for detecting characteristics of a probe. In an embodiment, the apparatus (100) comprises a vacuum chamber (104) and a beam generator (102) adapted to generate a beam of charged particles within the vacuum chamber (104). When the beam of charged particles falls onto the probe, interaction particles and/or interaction radiation are generated. The apparatus (100) further comprises an electromechanical unit (114) within the vacuum chamber (104) and a detector (110) comprising a plurality of detection units and being arranged on the electromechanical unit (114) allowing for the detector (110) to move from a first position (302) with respect to the beam generator (102) to a second position (304) with respect to the beam generator (102) and vice versa, upon a corresponding actuation of the electromechanical unit (114) performable from outside of the vacuum chamber (104).
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Citations
15 Claims
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1. An apparatus (100) for detecting characteristics of a probe, wherein the apparatus (100) comprises:
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a vacuum chamber (104), a beam generator (102), adapted to generate a beam of charged particles within the vacuum chamber (104), wherein interaction particles and/or interaction radiation are generated when the beam of charged particles falls onto the probe; an electromechanical unit (114) within the vacuum chamber (104); a detector (110) comprising a plurality of detection units and being arranged on the electromechanical unit (114), wherein the electromechanical unit (114) allowing for the detector (110) to move from a first position (302) with respect to the beam generator (102) to a second position (304) with respect to the beam generator (102) and vice versa, upon a corresponding actuation of the electromechanical unit (114) performable from outside of the vacuum chamber (104). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for detecting characteristics of a probe, wherein the method comprises:
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generating, by a beam generator (102), a first beam of charged particles within a vacuum chamber (104), wherein interaction particles and/or interaction radiation are generated when the first beam of charged particles falls onto the probe; detecting, by the detector (110) in a first position (302), the interaction particles and/or interaction radiation to perform a first measurement method; and moving, by an electromechanical unit (114), the detector (110) from the first position (302) to a second position (304) upon a corresponding actuation of an electromechanical unit (114) performable from outside of the vacuum chamber (104). - View Dependent Claims (12, 13, 14, 15)
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Specification