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MOVEABLE DETECTOR

  • US 20200135426A1
  • Filed: 10/23/2019
  • Published: 04/30/2020
  • Est. Priority Date: 10/25/2018
  • Status: Active Grant
First Claim
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1. An apparatus (100) for detecting characteristics of a probe, wherein the apparatus (100) comprises:

  • a vacuum chamber (104),a beam generator (102), adapted to generate a beam of charged particles within the vacuum chamber (104), wherein interaction particles and/or interaction radiation are generated when the beam of charged particles falls onto the probe;

    an electromechanical unit (114) within the vacuum chamber (104);

    a detector (110) comprising a plurality of detection units and being arranged on the electromechanical unit (114), wherein the electromechanical unit (114) allowing for the detector (110) to move from a first position (302) with respect to the beam generator (102) to a second position (304) with respect to the beam generator (102) and vice versa, upon a corresponding actuation of the electromechanical unit (114) performable from outside of the vacuum chamber (104).

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