×

MEASUREMENT AND ENDPOINTING OF SAMPLE THICKNESS

  • US 20200135427A1
  • Filed: 09/23/2019
  • Published: 04/30/2020
  • Est. Priority Date: 10/31/2018
  • Status: Active Grant
First Claim
Patent Images

1. A method of determining the thickness of a sample, comprising the steps of:

  • obtaining a diffraction pattern image of a sample of a first material, wherein the diffraction pattern image comprises at least image values representative for the diffraction pattern obtained for the sample;

    determining a slope of the image values;

    providing, for the first material, a relation between the thickness of the first material and the slope of image value of a corresponding diffraction pattern image of the first material; and

    using the determined slope and the relation to determine the thickness of the sample.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×