FEEDING STRUCTURE, UPPER ELECTRODE ASSEMBLY, AND PHYSICAL VAPOR DEPOSITION CHAMBER AND DEVICE

• US 20200135438A1
• Filed: 12/23/2019
• Published: 04/30/2020
• Est. Priority Date: 06/29/2017
• Status: Active Grant

• Current Assignee: Beijing Naura Microelectronics Equipment Co.Ltd. (NAURA Technology Group Co., Ltd.)
• Original Assignee: Beijing Naura Microelectronics Equipment Co.Ltd. (NAURA Technology Group Co., Ltd.)
• Inventors: DENG, Yuchun, ZHANG, Chao, CHEN, Peng, QIU, Guoqing, ZHAO, Mengxin
• Granted Patent: US 11,107,665 B2
• Time in Patent Office: Days
• CPC Class Codes: C23C 14/3407 Cathode assembly for sputtering apparatus, e.g. Target
• CPC Class Codes: C23C 14/35 by application of a magnetic field, e.g. magnetron sputtering C23C14/3457 takes precedence
• CPC Class Codes: H01J 2237/026 Shields
• CPC Class Codes: H01J 2237/20214 Rotation
• CPC Class Codes: H01J 2237/332 Coating
• CPC Class Codes: H01J 37/3405 Magnetron sputtering
• CPC Class Codes: H01J 37/3435 Target holders (includes backing plates and endblocks)

Abstract

The present disclosure provides a feeding structure, an upper electrode assembly, and a physical vapor deposition chamber and device. In the present disclosure a RF power is fed through the center of a first introduction member of the feeding structure and is evenly distributed onto a target by a plurality of distribution members.

Claims

1. A feeding structure for a physical vapor deposition device, comprising:

a first introduction member configured to receive power;

a second introduction member coupled to the first introduction member; and

a plurality of distribution members evenly distributed around an axis of the first introduction member,

wherein one end of each distribution member is coupled to the second introduction member and the other end of each distribution member is configured to provide power to a target.

2. The feeding structure of claim 1, wherein the first introduction member and the second introduction member are disposed coaxially with the target.

3. The feeding structure of claim 1, wherein the second introduction member includes a plurality of holes disposed symmetrically about a center of the second introduction member.

4. The feeding structure of claim 3, wherein the plurality of holes are arranged in a multi-ring structure on the second introduction member, each ring structure includes the same number of holes, and a radius of the holes increases in a direction from the center of the second introduction member to an edge of the second introduction member.

5. The feeding structure of claim 1, wherein the distribution members include a circular cross-section, and a diameter of the distribution members is 10 mm or more.

6. An upper electrode assembly, comprising:

a feeding structure comprising a first introduction member configured to receive power;

a second introduction member coupled to the first introduction member;

a plurality of distribution members evenly distributed around an axis of the first introduction member; and

a radio frequency (RF) power supply or a direct current (DC) power supply coupled to the first introduction member.

7. The upper electrode assembly of claim 6, further comprising:

a support base, one end of the support base being configured to support the second introduction member and the other end of the support base being configured to fix a target, and the plurality of distribution members being disposed in the support base and configured to couple to the target; and

a magnetron bearing housing mounted to the support base for converting an external drive along a first axis to an output drive along a second axis, the first axis being offset from an axis of the first introduction member.

8. The upper electrode assembly of claim 7, wherein the support base comprises:

a support wall, one end of the support wall being configured to support the second introduction member and the other end of the support wall being fixed to the target;

a partition layer laterally disposed within the support wall to divide the support wall into a first chamber facing the second introduction member and a second chamber facing the target, wherein the magnetron bearing housing is disposed in the first chamber and includes;

an input shaft configured to receive the external drive along the first axis;

an output shaft extending through the partition layer into the second chamber and outputting the output drive along the second axis, the second axis coincides with the axis of the first introduction member; and

a magnetron assembly disposed within the second chamber and mounted on the output shaft.

9. The upper electrode assembly of claim 8, further comprising:

a motor disposed outside the first chamber;

wherein the input shaft of the magnetron bearing housing passes through the second introduction member and connects to an output shaft of the motor.

10. The upper electrode assembly of claim 8, further comprising:

a motor disposed within the first chamber and covered by a shielding structure;

wherein the input shaft of the magnetron bearing housing is connected to an output shaft of the motor.

11. The upper electrode assembly of claim 7, wherein:

the support base includes a support wall and a support cover;

one end of the support wall is connected to the support cover to form a third chamber, and the other end of the support wall is fixed to the target;

the support cover is used to support the second introduction member;

the magnetron bearing housing is disposed in the third chamber and covered by a waterproof structure, the magnetron bearing housing including;

an input shaft configured to receive the external drive along the first axis; and

an output shaft extending through the partition layer into the third chamber and outputting the output drive along the second axis, the second axis coincides with the axis of the first introduction member;

the upper electrode assembly further includes;

a magnetron assembly disposed within the third chamber and mounted on the output shaft.

12. The upper electrode assembly of claim 11, further comprising:

a motor disposed outside the third chamber;

wherein the input shaft of the magnetron bearing housing passes through the support cover and the second introduction member in sequence and connects to an output shaft of the motor.

13. The upper electrode assembly of claim 11, further comprising:

a motor disposed in the third chamber and covered by the waterproof structure;

wherein the input shaft of the magnetron bearing housing is connected to an output shaft of the motor.

14. The upper electrode assembly of claim 7, further comprising:

a shielding cover arranged on a periphery of the support base; and

a shielding plate disposed on a top end of the shielding cover and fixed to a top surface of the second introduction member by an insulating pad, and the first introduction member passes through the shielding plate.

15. A physical vapor deposition chamber, comprising:

a chamber body; and

an upper electrode assembly disposed on top of the chamber body, the upper electrode assembly comprising a feeding structure comprising a first introduction member configured to receive power;

a second introduction member coupled to the first introduction member;

a plurality of distribution members evenly distributed around an axis of the first introduction member; and

a radio frequency (RF) power supply or a direct current (DC) power supply coupled to the first introduction member.

16. A physical vapor deposition device, comprising:

a physical vapor disposition chamber comprising a chamber body; and

an upper electrode assembly disposed on top of the chamber body, the upper electrode assembly comprising a feeding structure including a first introduction member configured to receive power;

a second introduction member coupled to the first introduction member;

a plurality of distribution members evenly distributed around an axis of the first introduction member; and

a radio frequency (RF) power supply or a direct current (DC) power supply coupled to the first introduction member.

17. The physical vapor deposition device of claim 16, wherein the upper electrode assembly further includes:

a support base, one end of the support base being configured to support the second introduction member and the other end of the support base being configured to fix a target, and the plurality of distribution members being disposed in the support base and configured to couple to the target; and

a magnetron bearing housing mounted to the support base for converting an external drive along a first axis to an output drive along a second axis, the first axis being offset from an axis of the first introduction member.

18. The physical vapor deposition device of claim 17, wherein the support base includes:

a support wall, one end of the support wall being configured to support the second introduction member and the other end of the support wall being fixed to the target;

a partition layer laterally disposed within the support wall to divide the support wall into a first chamber facing the second introduction member and a second chamber facing the target;

the magnetron bearing housing being disposed in the first chamber and including;

an input shaft configured to receive the external drive along the first axis;

an output shaft extending through the partition layer into the second chamber and outputting the output drive along the second axis, the second axis coincides with the axis of the first introduction member; and

a magnetron assembly disposed within the second chamber and mounted on the output shaft.

19. The physical vapor deposition device of claim 18, the upper electrode assembly further comprising:

a motor disposed outside the first chamber;

wherein the input shaft of the magnetron bearing housing passes through the second introduction member and connects to an output shaft of the motor.

20. The physical vapor deposition device of claim 18, the upper electrode assembly further comprising:

a motor disposed within the first chamber and covered by a shielding structure;

wherein the input shaft of the magnetron bearing housing is connected to an output shaft of the motor.