METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE AND A COATING MATERIAL

• US 20200135454A1
• Filed: 12/31/2019
• Published: 04/30/2020
• Est. Priority Date: 11/29/2017
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: CHIEN, Yu-Ling Chang, CHEN, Chien-Chih, LIN, Chin-Hsiang, CHANG, Ching-Yu, CHENG, Yahru
• Granted Patent: US 11,276,568 B2
• Time in Patent Office: Days
• CPC Class Codes: C09D 125/06 Polystyrene
• CPC Class Codes: C09D 125/16 Homopolymers or copolymers of alkyl-substituted styrenes
• CPC Class Codes: C09D 125/18 Homopolymers or copolymers of aromatic monomers containing elements other than carbon and hydrogen
• CPC Class Codes: C09D 133/12 Homopolymers or copolymers of methyl methacrylate
• CPC Class Codes: H01L 21/02118 carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC polymers per se C08G, photoresist per se G03F
• CPC Class Codes: H01L 21/0273 characterised by the treatment of photoresist layers
• CPC Class Codes: H01L 21/0332 characterised by their composition, e.g. multilayer masks, materials
• CPC Class Codes: H01L 21/31111 by chemical means
• CPC Class Codes: H01L 21/31133 by chemical means
• CPC Class Codes: H01L 21/31144 using masks
• CPC Class Codes: H01L 21/768 Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
• CPC Class Codes: H01L 21/76802 by forming openings in dielectrics

Abstract

In a method of manufacturing a semiconductor device, an underlying structure is formed. A surface grafting layer is formed on the underlying structure. A photo resist layer is formed on the surface grafting layer. The surface grafting layer includes a coating material including a backbone polymer, a surface grafting unit coupled to the backbone polymer and an adhesion unit coupled to the backbone polymer.

Claims

1. A coating material, comprising:

a backbone polymer;

a surface grafting unit coupled to an end of the backbone polymer;

an adhesion unit different from the surface grafting unit; and

a polarity switching unit coupled to the backbone polymer as a side chain.

2. The coating material of claim 1, wherein the surface grafting unit includes one selected from the group consisting of —

NH, —

OH, —

SH and —

COOH.

3. The coating material of claim 1, wherein the surface grafting unit is —

SH.

4. The coating material of claim 1, wherein the adhesion unit includes one or more units selected from the group consisting of ketones, ethers, amides, carboxylic acids and alcohols.

5. The coating material of claim 4, wherein the adhesion unit is coupled to the backbone polymer as a side chain.

6. The coating material of claim 1, wherein the backbone polymer includes at least one selected from the group consisting of poly-methyl methacrylate (PMMA), polystyrene (PS) and polyhydroxystyrene (PHS).

7. The coating material of claim 1, wherein the polarity switching unit is at least one selected from the group consisting of t-BOC protected polyhydroxystyrene, methyl adamantyl methacrylate (MAdMA), ethyl adamantyl methacrylate (EAdMA) and propyl adamantyl methacrylate (PAdMA).

8. The coating material of claim 1, further comprising an acidic component or an acid quencher coupled to the backbone polymer as a side chain.

9. The coating material of claim 8, wherein the acidic component includes one or more of triphenylsulfonium, nonaflate, and triflate.

10. The coating material of claim 8, wherein the acid quencher includes one or more of diamines, triamines, tetraamines, quaternary ammonium compounds, trialkylammonium compounds, amides, ureas, tBOC-blocked amines, n-Boc-pyrrole, 1,8-diazabicyclo[5,4,0]undec-7-ene, and 1,5-diazabicyclo[4,3,0]non-5-ene.

11. The coating material of claim 1, further comprising a surfactant.

12. A surface grafting material, comprising:

a backbone polymer;

a polarity switching unit coupled to the backbone polymer as a side chain;

a surface grafting unit coupled to an end of the backbone polymer;

an acidic component or an acid quencher coupled to the backbone polymer as a side chain; and

one or more organic units coupled to the backbone polymer as a side chain.

13. The surface grafting material of claim 12, further comprising:

an adhesion unit different from the surface grafting unit and coupled to the backbone polymer as a side chain.

14. The surface grafting material of claim 13, wherein the adhesion unit includes one or more units selected from the group consisting of ketones, ethers, amides, carboxylic acids and alcohols.

15. The surface grafting material of claim 12, wherein the acidic component includes one or more of triphenylsulfonium, nonaflate, and triflate.

16. The surface grafting material of claim 12, wherein the acid quencher includes one or more of diamines, triamines, tetraamines, quaternary ammonium compounds, trialkylammonium compounds, amides, ureas, tBOC-blocked amines, n-Boc-pyrrole, 1,8-diazabicyclo[5,4,0]undec-7-ene, and 1,5-diazabicyclo[4,3,0]non-5-ene.

17. The surface grafting material of claim 12, wherein the one or more organic units includes one or more of adamantantyl, benzenyl, and norbornene.

18. The surface grafting material of claim 12, wherein the one or more organic units includes one or more of silicon, silicon nitride, Ti, TiN, Al, aluminum oxide, and SiON.

19. A composition, comprising:

a solvent including one of glycol ethers, propylene glycol monomethyl ether acetate, lactates, propionates, cellosolve esters, aromatic hydrocarbons, and ketones; and

a coating material including

a backbone polymer, and

a surface grafting unit, an adhesion unit, a polarity switching unit, an acidic unit, a surfactant, and an organic unit, each coupled to the backbone polymer.

20. The composition of claim 19, wherein

an amount of the solvent is from 80 wt % to 99 wt % with respect to a total weight of the coating material;

an amount of the surface grafting unit is from 10 wt % to 90 wt % with respect to the total weight of the coating material;

an amount of the adhesion unit is from 10 wt % to 90 wt % with respect to the total weight of the coating material; and

an amount of the polarity switching unit, the organic unit, the acidic unit, and surfactant is from 0 wt % to 80 wt % with respect to the total weight of the coating material.