Single Crystal Substrate And Silicon Carbide Substrate
First Claim
1. A single crystal substrate, characterized in thatthe single crystal substrate comprises a foundation substrate provided with a plurality of first grooves, which include a first crystal face and a second crystal face opposed to the first crystal face in an inner face thereof, and the extending direction of which is a <
- 110>
direction, and a plurality of second grooves, the extending direction of which intersects with the first grooves, and in which the first grooves are formed in a displaced manner in a depth direction, anda transverse cross-sectional shape of the second groove is a shape in which straight lines are open at an opening angle less than 180°
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1 Assignment
0 Petitions
Accused Products
Abstract
A single crystal substrate is provided and is characterized in that the single crystal substrate has a foundation substrate provided with a plurality of first grooves, which include a first crystal face and a second crystal face opposed to the first crystal face in an inner face thereof, and the extending direction of which is a <110> direction, and a plurality of second grooves, the extending direction of which intersects with the first grooves, and in which the first grooves are formed in a displaced manner in a depth direction, and a transverse cross-sectional shape of the second groove is a shape in which straight lines are open at an opening angle less than 180°. Further, it is preferred that an angle formed by the first crystal face and the second crystal face is more than 70.6°.
1 Citation
11 Claims
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1. A single crystal substrate, characterized in that
the single crystal substrate comprises a foundation substrate provided with a plurality of first grooves, which include a first crystal face and a second crystal face opposed to the first crystal face in an inner face thereof, and the extending direction of which is a < - 110>
direction, and a plurality of second grooves, the extending direction of which intersects with the first grooves, and in which the first grooves are formed in a displaced manner in a depth direction, anda transverse cross-sectional shape of the second groove is a shape in which straight lines are open at an opening angle less than 180°
. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
- 110>
Specification