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Single Crystal Substrate And Silicon Carbide Substrate

  • US 20200135461A1
  • Filed: 06/28/2018
  • Published: 04/30/2020
  • Est. Priority Date: 07/07/2017
  • Status: Active Grant
First Claim
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1. A single crystal substrate, characterized in thatthe single crystal substrate comprises a foundation substrate provided with a plurality of first grooves, which include a first crystal face and a second crystal face opposed to the first crystal face in an inner face thereof, and the extending direction of which is a <

  • 110>

    direction, and a plurality of second grooves, the extending direction of which intersects with the first grooves, and in which the first grooves are formed in a displaced manner in a depth direction, anda transverse cross-sectional shape of the second groove is a shape in which straight lines are open at an opening angle less than 180°

    .

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