METHODS OF PATTERNING NICKEL SILICIDE LAYERS ON A SEMICONDUCTOR DEVICE

• US 20200135492A1
• Filed: 10/25/2018
• Published: 04/30/2020
• Est. Priority Date: 10/25/2018
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: KIM, JONG MUN, YING, CHENTSAU CHRIS, REN, HE, NEMANI, SRINIVAS D., YIEH, ELLIE
• Granted Patent: US 10,692,734 B2
• Time in Patent Office: Days
• CPC Class Codes: H01L 21/32137 of silicon-containing layers
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: H01L 21/76885 By forming conductive members before deposition of protective insulating material, e.g. pillars, studs
• CPC Class Codes: H01L 23/53209 based on metals, e.g. alloys, metal silicides H01L23/53285 takes precedence
• CPC Class Codes: H01L 23/53271 containing semiconductor material, e.g. polysilicon

Abstract

Methods and apparatus for processing a substrate and etching a nickel silicide layer are provided herein. In some embodiments, a method of etching a nickel silicide film in a semiconductor device include: contacting a nickel silicide film disposed on a substrate in a process chamber with an etching gas sufficient to form one or more soluble or volatile products in order to reduce or eliminate re-deposition of products formed from the nickel silicide film upon the nickel silicide film.

Claims

1. A method of etching a nickel silicide film, comprising:

flowing an etching gas comprising a mixture of gases into a process chamber having a substrate disposed therein, the substrate comprising a nickel silicide layer having a patterned film stack disposed thereon, the patterned film stack covering a first portion of the nickel silicide layer and exposing a second portion of the nickel silicide layer; and

contacting the nickel silicide layer with the etching gas to remove the second portion while forming one or more nickel silicide edges to the patterned film stack, wherein the one or more nickel silicide edges have a profile of greater than 80 degrees.

2. The method of claim 1, wherein contacting the nickel silicide layer with the etching gas forms a soluble passivation layer upon the patterned film stack and the one or more nickel silicide edges.

3. The method of claim 1, wherein the one or more nickel silicide edges have a profile of greater than 90 degrees.

4. The method of claim 1, wherein the mixture of gases is preselected to form only soluble and volatile products upon reacting with the second portion.

5. The method of claim 1, wherein the mixture of gases comprises boron trichloride for forming a soluble passivation layer upon the one or more nickel silicide edges.

6. The method of claim 1, further comprising rinsing the film stack to remove soluble passivation layer and expose the one or more nickel silicide edges.

7. The method of claim 1, wherein the mixture of gases are preselected to react with the second portion to extract silicon and nickel from the second portion, react with nickel to form a volatile nickel carbonyl, react with silicon to form one or more volatile by-products, and to form a passivation layer upon one or more nickel silicide edges.

8. The method of claim 1, wherein the mixture of gases comprises carbon monoxide in an amount sufficient to react with nickel to form a nickel carbonyl.

9. The method of claim 1, wherein the mixture of gases comprises carbon tetrafluoride in an amount sufficient to extract silicon from the second portion to form volatile silicon tetrafluoride.

10. The method of claim 1, wherein the mixture of gases comprises boron trichloride in an amount sufficient to extract silicon from the second portion to form volatile silicon tetrachloride.

11. The method of claim 1, wherein boron trichloride is provided as a bombardment ion and form a soluble BClx passivation layer upon the one or more nickel silicide edges.

12. The method of claim 1, wherein the mixture of gases comprises boron trichloride, carbon monoxide, carbon tetrafluoride in amounts and under conditions suitable for reacting with the second portion to form soluble BClx, volatile silicon tetrachloride, volatile silicon tetrafluoride, and volatile nickel carbonyl, wherein x is an integer.

13. A method of etching a nickel silicide film in a semiconductor device, comprising:

contacting a nickel silicide film disposed on a substrate in a process chamber with an etching gas sufficient to form a first nickel silicide portion having an edge profile greater than 80 degrees and a second nickel silicide portion, wherein the etching gas comprises a mixture of gases preselected to react with the second nickel silicide portion to extract silicon and nickel from the second nickel silicide portion, react with nickel to form a volatile nickel carbonyl, react with silicon to form one or more volatile by-products, and to form a passivation layer upon the first nickel silicide portion.

14. The method of claim 13, wherein the etching gas comprises a fluorocarbon gas.

15. The method of claim 13, wherein the etching gas comprises argon, helium, oxygen containing gas, nitrogen gas (N₂), hydrogen gas (H₂), a halogen gas, chlorine (Cl₂), boron trichloride (BCl₃), hydrogen bromide (HBr), or combinations thereof.

16. The method of claim 13, wherein the etching gas comprises carbon monoxide (CO) in an amount sufficient to react with nickel of a nickel silicide layer to form nickel tetracarbonyl (Ni(CO)₄) or a volatile nickel carbonyl.

17. The method of claim 13, wherein a pressure of the process chamber is between about 3 mTorr and 100 mTorr.

18. The method of claim 13, wherein the process chamber comprises BCl₃ provided at a flow rate of 0.5 to 100 sccm.

19. The method of claim 13, where the process chamber is under conditions where a first power (Ws) is about 100 W to 3000 W and a bias power (Wb) is between about 30 W to about 500 W.

20. A semiconductor film stack, comprising:

a nickel silicide layer disposed upon a substrate within a plurality of layers, wherein the nickel silicide layer has a an angled edge comprising a side profile that contacts the substrate on an angle in the amount of 80 degrees to 90 degrees to a substrate plane of the substrate, and wherein the nickel silicide layer is suitable as a metal line within a film stack.