SIDE STORAGE PODS, EQUIPMENT FRONT END MODULES, AND METHODS FOR OPERATING EQUIPMENT FRONT END MODULES

• US 20200135499A1
• Filed: 10/18/2019
• Published: 04/30/2020
• Est. Priority Date: 10/26/2018
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Pannese, Patrick, Narasimhan, Murali, Reuter, Paul B., Merry, Nir
• Granted Patent: US 11,749,537 B2
• Time in Patent Office: Days
• CPC Class Codes: B01D 2253/102 Carbon
• CPC Class Codes: B01D 2259/4525 for storage and dispensing systems
• CPC Class Codes: B01D 2279/35 for venting arrangements
• CPC Class Codes: B01D 46/0039 with flow guiding by feed or discharge devices
• CPC Class Codes: B01D 53/0446 Means for feeding or distributing gases
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/67167 surrounding a central transfer chamber
• CPC Class Codes: H01L 21/67196 characterized by the construction of the transfer chamber
• CPC Class Codes: H01L 21/67389 characterised by atmosphere control
• CPC Class Codes: H01L 21/67393 characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
• CPC Class Codes: H01L 21/67766 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: H01L 21/67769 Storage means

Abstract

Electronic device processing assemblies including an EFEM with at least one side storage pod attached thereto. The side storage pod has a side storage pod container. A supply conduit extends between an upper plenum of the EFEM to the side storage pod container. A fan causes purge gas to simultaneously flow into the EFEM chamber and into the side storage pod container. The fan also causes recirculation of the purge gas from the EFEM chamber. Methods of operating EFEMs and EFEMs are also disclosed.

Claims

1. A side storage pod, comprising:

a first chamber;

a first side storage container located in the first chamber, the first side storage container configured to receive one or more substrates from an equipment front end module, the first side storage container including an opening configured to be adjacent to a first opening of the equipment front end module;

a container plenum in fluid communication with the first side storage container; and

a first supply conduit coupled to the container plenum and configured to deliver a gas flow from an upper plenum into the container plenum.

2. The side storage pod of claim 1, further comprising a first supply baffle disposed between the container plenum and the first side storage container.

3. The side storage pod of claim 2, wherein the first supply baffle includes a plurality of openings configured to distribute a purge gas flow delivered by the first supply conduit substantially uniformly throughout the first side storage container.

4. The side storage pod of claim 1, wherein the first supply conduit is further couplable to an external purge gas supply.

5. The side storage pod of claim 1, further comprising

a second chamber;

a second side storage container located in the second chamber, the second side storage container configured to receive one or more substrates from the equipment front end module, the second side storage container including an opening configured to be adjacent to a second opening of the equipment front end module;

a second container plenum in fluid communication with the second side storage container; and

a second supply conduit coupled to the second container plenum and configured to deliver a purge gas flow from an upper plenum into the second container plenum.

6. The side storage pod of claim 5, further including a second supply baffle disposed between the second container plenum and the second side storage container wherein the second supply baffle includes a plurality of openings configured to distribute the purge gas flow delivered by the second supply conduit substantially uniformly though the second side storage container.

7. The side storage pod of claim 5, wherein the second supply conduit is further couplable to an external purge gas supply.

8. An electronic device processing assembly, comprising:

an equipment front end module including an equipment front end module chamber having one or more interface openings and an upper plenum in fluid communication with the equipment front end module chamber;

one or more side storage pods attached to a body of the equipment front end module, the one or more side storage pods each comprising;

a first chamber;

a first side storage container located in the first chamber, the first side storage container configured to receive one or more substrates from the equipment front end module chamber, the first side storage container including a first opening located adjacent to a first opening of the equipment front end module chamber;

a first container plenum in fluid communication with the first side storage container; and

a first supply conduit coupled between the upper plenum and the first container plenum and configured to deliver a purge gas flow from the upper plenum into the first container plenum.

9. The electronic device processing assembly of claim 8, further comprising a heater in the upper plenum, the heater configured to heat purge gas in the upper plenum.

10. The electronic device processing assembly of claim 8, further comprising a fan, the fan configured to recirculate purge gas into the upper plenum from the equipment front end module chamber and the first side storage container.

11. The electronic device processing assembly of claim 8, further including a first supply baffle disposed between the first container plenum and the first side storage container.

12. The electronic device processing assembly of claim 11, wherein the first supply baffle includes a plurality of openings configured to distribute the purge gas flow delivered by the first supply conduit substantially uniformly throughout the first side storage container.

13. The electronic device processing assembly of claim 8, wherein the first supply conduit is further couplable to an external purge gas supply.

14. The electronic device processing assembly of claim 8, wherein the side storage pod further comprises:

a second chamber;

a second side storage container located in the second chamber, the second side storage container configured to receive one or more substrates from the equipment front end module chamber, the second side storage container including an opening configured to be adjacent to a second opening of the equipment front end module chamber;

a second container plenum in fluid communication with the second side storage container; and

a second supply conduit coupled between the upper plenum and the second container plenum and configured to deliver a purge gas flow from the upper plenum into the second container plenum.

15. A method of operating an equipment front end module, comprising:

providing an equipment front end module having an upper plenum and an equipment front end module chamber in fluid communication with the upper plenum, and a side storage pod including a side storage container;

flowing purge gas from the upper plenum into the equipment front end module chamber and simultaneously into the side storage container located within the side storage pod from the upper plenum;

exhausting the purge gas from the side storage container into the equipment front end module chamber; and

recirculating at least a portion of the purge gas from the equipment front end module chamber into the upper plenum.

16. The method of claim 15 further comprising purging at least some of the purge gas from the equipment front end module chamber through an exhaust.

17. The method of claim 15, further comprising filtering the purge gas exiting from the upper plenum to the equipment front end module chamber.

18. The method of claim 15 further including heating the purge gas disposed in the equipment front end module.

19. The method of claim 15 further comprising flowing the purge gas through a homogenization plate disposed between the upper plenum and the equipment front end module chamber.

20. The method of claim 15 wherein flowing the purge gas from the upper plenum into the side storage container further includes evenly distributing the purge gas into the side storage container by flowing the purge gas through a baffle plate disposed between a container plenum and the side storage container.