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Integrated Circuit Fabrication System with Adjustable Gas Injector and Method Utilizing the Same

  • US 20200135510A1
  • Filed: 12/26/2019
  • Published: 04/30/2020
  • Est. Priority Date: 09/29/2017
  • Status: Active Grant
First Claim
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1. A method for semiconductor fabrication:

  • providing a semiconductor apparatus that further includesa processing chamber;

    a substrate stage configured in the processing chamber and being operable to secure and rotate a semiconductor wafer;

    a gas injector attached to the processing chamber and designed to inject a chemical to the processing chamber;

    a window attached to the gas injector and in direct contacting with the O-ring;

    an O-ring interposed between the gas injector and the window, wherein the O-ring directly contacts the gas injector and the window; and

    an adjustable fastening device integrated with the gas injector and designed to secure the window and the gas injector cover to the gas injector with an adjustable height, wherein the adjustable fastening device includes a base plate configured on the gas injector cover; and

    a plurality of fasteners to fasten the gas injector cover to the gas injector, wherein each of the fasteners includes a bolt, a first nut and a second nut both sleeved on the bolt, wherein the first nut is configured above the base plate and the second nut is configured between the base plate and the gas injector cover; and

    adjusting the adjustable fastening device to secure the window to the gas injector with an adjustable height.

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