SIDE STORAGE PODS, EQUIPMENT FRONT END MODULES, AND METHODS FOR OPERATING THE SAME

• US 20200135520A1
• Filed: 10/17/2019
• Published: 04/30/2020
• Est. Priority Date: 10/26/2018
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Reuter, Paul, Hruzek, Dean C., Merry, Nir, Menk, John C., Baumgarten, Douglas B.
• Granted Patent: US 11,610,794 B2
• Time in Patent Office: Days
• CPC Class Codes: B01D 2253/102 Carbon
• CPC Class Codes: B01D 2258/0216 from CVD treatment or semi-conductor manufacturing
• CPC Class Codes: B01D 2259/4525 for storage and dispensing systems
• CPC Class Codes: B01D 53/0446 Means for feeding or distributing gases
• CPC Class Codes: B01D 53/40 Acidic components B01D53/44 takes precedence
• CPC Class Codes: B01D 53/82 with stationary reactants
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/67196 characterized by the construction of the transfer chamber
• CPC Class Codes: H01L 21/67389 characterised by atmosphere control
• CPC Class Codes: H01L 21/67393 characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl

Abstract

Electronic device processing assemblies including an equipment front end module (EFEM) with at least one side storage pod attached thereto are described. The side storage pod has a side storage container. In some embodiments, an exhaust conduit extends between the chamber and a pod plenum that can contain a chemical filter proximate thereto. A supplemental fan may draw purge gas from the pod plenum through the chemical filter and route the gas through a return duct to an upper plenum of the EFEM. Methods and side storage pods in accordance with these and other embodiments are also disclosed.

Claims

1. A side storage pod, comprising:

one or more interior chambers;

one or more side storage containers located in the one or more interior chambers, each of the one or more side storage containers configured to receive one or more substrates, each of the one or more side storage containers further comprising;

an opening configured to be located adjacent an opening of a body of an equipment front end module; and

an exhaust port configured to exhaust gas entering the opening;

a pod plenum; and

an exhaust conduit coupled between the exhaust port and the pod plenum, and

2. The side storage pod of claim 1, further comprising a chemical filter located proximate the pod plenum.

3. The side storage pod of claim 1, further comprising the pod plenum configured to be coupleable to a return duct.

4. The side storage pod of claim 1, further comprising a heater proximate the plenum, the heater configured to heat purge gas passing through the pod plenum.

5. The side storage pod of claim 1, further comprising a supplemental fan coupled to the pod plenum and configured to flow exhaust gas into a return duct.

6. The side storage pod of claim 5, wherein the fan is located in the side storage pod.

7. The side storage pod of claim 1 further comprising an exhaust baffle located in the one or more side storage containers between the opening and the exhaust port.

8. The side storage pod of claim 7 wherein the exhaust baffle is located between the opening and an exhaust plenum containing the exhaust port.

9. The side storage pod of claim 1, further comprising one or more sensors located along an exhaust flow path from the one or more side storage containers.

10. The side storage pod of claim 9, wherein the one or more sensors comprise a flow sensor or a pressure sensor.

11. The side storage pod of claim 1, comprising a supplemental fan comprising a variable speed fan configured to achieve a desired flow rate through the one or more side storage containers.

12. An electronic device processing assembly, comprising:

an equipment front end module including an equipment front end module chamber having one or more interface openings;

one or more side storage pods attached to a body of the equipment front end module, the one or more side storage pods comprising;

one or more interior chambers;

one or more side storage containers located in the one or more interior chambers, each of the one or more side storage containers configured to receive one or more substrates from the equipment front end module chamber, each of the one or more side storage containers further comprising;

an opening located adjacent one of the interface openings of the equipment front end module; and

an exhaust port configured to exhaust gas entering the opening;

a pod plenum; and

an exhaust conduit coupled between the exhaust port and the pod plenum.

13. The electronic device processing assembly of claim 12, further comprising a chemical filter located proximate the pod plenum.

14. The electronic device processing assembly of claim 12, further comprising a heater proximate the pod plenum, the heater configured to heat purge gas flowing through the pod plenum.

15. The electronic device processing assembly of claim 12, further comprising a supplemental fan coupled to the pod plenum and configured to flow exhaust gas into a return duct extending to an upper plenum of the equipment front end module.

16. The electronic device processing assembly of claim 15, wherein the supplemental fan is located in the side storage pod.

17. The electronic device processing assembly of claim 12 further comprising an exhaust baffle located in the one or more side storage containers between the opening and the exhaust port.

18. A method of operating an equipment front end module, comprising:

flowing purge gas from an upper plenum to an equipment front end module chamber and into a side storage container of a side storage pod; and

exhausting purge gas from the side storage container through a return duct coupled to the upper plenum of the equipment front end module.

19. The method of operating an equipment front end module of claim 18, further comprising exhausting purge gas from the equipment front end module chamber through the return duct.

20. The method of operating an equipment front end module of claim 18, further comprising flowing exhausting the purge gas from the side storage container through a chemical filter to generate filtered gas.