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ELECTROSTATIC CHUCK

  • US 20200135529A1
  • Filed: 09/19/2019
  • Published: 04/30/2020
  • Est. Priority Date: 10/30/2018
  • Status: Active Grant
First Claim
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1. An electrostatic chuck comprising:

  • a ceramic dielectric substrate having a first major surface for mounting a suction target and a second major surface on opposite side from the first major surface;

    a base plate supporting the ceramic dielectric substrate and including a gas feed channel; and

    a first porous part provided at a position between the base plate and the first major surface of the ceramic dielectric substrate, the position being opposed to the gas feed channel,the first porous part including a plurality of sparse portions each including a plurality of pores, the plurality of sparse portions being spaced from each other, andeach of the plurality of sparse portions extending in a direction inclined by a prescribed angle with respect to a first direction from the base plate to the ceramic dielectric substrate.

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