ELECTRONIC COMPONENT HAVING A TRANSISTOR AND INTERDIGITATED FINGERS TO FORM AT LEAST A PORTION OF A CAPACITIVE COMPONENT WITHIN THE ELECTRONIC COMPONENT

• US 20200135638A1
• Filed: 02/22/2018
• Published: 04/30/2020
• Est. Priority Date: 02/24/2017
• Status: Active Grant

• Current Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Original Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Inventors: THOLLIN, Benoit, CATELAIN, Thibault
• Granted Patent: US 10,957,639 B2
• Time in Patent Office: Days
• CPC Class Codes: H01L 2224/16225 the item being non-metallic, e.g. insulating substrate with or without metallisation
• CPC Class Codes: H01L 23/5223 Capacitor integral with wiring layers
• CPC Class Codes: H01L 24/16 of an individual bump connector
• CPC Class Codes: H01L 27/0605 integrated circuits made of compound material, e.g. AIIIBV
• CPC Class Codes: H01L 27/0629 in combination with diodes, or resistors, or capacitors
• CPC Class Codes: H01L 27/0805 Capacitors only
• CPC Class Codes: H01L 28/40 Capacitors
• CPC Class Codes: H01L 2924/156 Material

Abstract

An electronic component includes a part incorporating a transistor provided with a control electrode and with first and second electrodes. The electronic component includes first, second, and third electrical connection terminals extending on a connection face of the part incorporating the transistor, the first electrical connection terminal being electrically linked with the first electrode, the second electrical connection terminal being electrically linked with the second electrode and the third electrical connection terminal being electrically linked with the control electrode. The electronic component includes a first set of electrically conductive fingers and a second set of electrically conductive fingers, the fingers of the first and second sets of fingers being interdigitated, at the level of the connection face, to form at least a part of a capacitive component. The fingers of the first set of fingers are electrically linked to the first electrical connection terminal.

Claims

1. An electronic component comprising a part incorporating a transistor provided with a control elegytrode and with first and second electrodes, the electronic component comprising first, second and third electrical connection terminals extending on a connection face of said part incorporating the transistor, the first electrical connection terminal being electrically linked with the first electrode, the second electrical connection terminal being electrically linked with the second electrode and the third electrical connection terminal being electrically linked with the control electrode, the electronic component comprising a first set of electrically conductive fingers and a second set of electrically conductive fingers, the fingers of the first and second sets of fingers being interdigitated, at the level of the connection face, to form at least a part of a capacitive component, and the fingers of the first set of fingers being electrically linked to the first electrical connection terminal, characterized in that the first electrical connection terminal comprises:

an electrically conductive member extending on the connection face, and

a plurality of pillars linked electrically to the member arranged between the pillars and the connection face.

2. The component according to claim 1, wherein the fingers of the first set of fingers and of the second set of fingers extend along their length parallel to the connection face.

3. The component according to claim 1, wherein at least a part of each finger of the first set of fingers forms a continuity of material with at least a part of the first electrical connection terminal.

4. The component according to claim 1, wherein:

the fingers of the first set of fingers form a continuity of material with the electrically conductive member of the first electrical connection terminal, or

each finger of the first set of fingers comprises a first longitudinal part and a second longitudinal part, the first part being arranged between the second part and the connection face said first parts forming, with the member, a first continuity of material, and said second parts each forming, with a corresponding pillar of the first electrical connection terminal, a second continuity of material, or

each finger of the first set of fingers forms a continuity of material with at least one pillar of the first connection terminal.

5. The component according to claim 1, wherein the fingers of the first set of fingers form a continuity of material with the electrically conductive member of the first electrical connection terminal, and wherein the electronic component comprises a third set of electrically conductive fingers and a fourth set of electrically conductive fingers, the fingers of the third set of fingers and of the fourth set of fingers being interdigitated, each finger of the fourth set of fingers forming, with at least one pillar of the first electrical connection terminal, a continuity of material, and wherein:

each finger of the first set of fingers comprises a longitudinal part arranged between a longitudinal part of a finger of the third set of fingers and the connection face,

each finger of the second set of fingers comprises a longitudinal part arranged between a longitudinal part of a finger of the fourth set of fingers and the connection face,

the fingers of the first set of fingers are electrically linked to the fingers of the fourth set of fingers,

the fingers of the second set of fingers are electrically linked to the fingers of the third set of fingers.

6. The component according to claim 1, wherein the fingers of the first set of fingers and of the second set of fingers are interdigitated between the connection face and a plane situated at a distance from the connection face and passing through the first, second and third electrical connection terminals.

7. The component according to claim 1, wherein the first, second and third electrical connection terminals are arranged at the periphery of the connection face resulting in the presence of a volume facing the connection face within which the fingers of the first and second set of fingers are arranged.

8. The component according to claim 1, wherein said transistor is a first transistor of which the first electrode is a source electrode of the first transistor, the second electrode is a drain electrode of the first transistor, and the control electrode of the first transistor is a gate electrode of the first transistor, and wherein the electronic component comprises:

an additional transistor forming a second transistor provided with a gate electrode, a source electrode and a drain electrode,

a fourth electrical connection terminal extending on the connection face and electrically linked to the gate electrode of the second transistor,

a fifth electrical connection terminal extending on the connection face and being electrically linked to the drain electrode of the second transistor, the fingers of the second set of fingers being electrically linked to the fifth electrical connection terminal,

the source electrode of the second transistor being electrically linked to the second electrical connection terminal, the first electrical connection terminal being intended to be linked to a direct current negative potential of an electrical power supply, and the fifth electrical connection terminal being intended to be linked to a direct current positive potential of the electrical power supply with the result that the second electrical connection terminal forms an output capable of supplying an alternating current.

9. A device for converting electrical energy, comprising a first electronic component and a second electronic component, the first electronic component and the second electronic component being the component according to claim 1, and wherein:

the first electrode of the transistor of the first electronic component is a source electrode, and is intended to be electrically linked to a direct current negative potential of an electrical power supply of the device,

the second electrode of the transistor of the first electronic component is a drain electrode, and is intended to be electrically linked to an alternating current output of the device,

the control electrode of the transistor of the first electronic component is a gate electrode,

the first electrode of the transistor of the second electronic component is a drain electrode, and is intended to be electrically linked to a direct current positive potential of the electrical power supply of the device,

the second electrode of the transistor of the second electronic component is a source electrode, and is intended to be linked to the alternating current output,

the control electrode of the transistor of the second electronic component is a gate electrode,

the fingers of the first set of fingers of the first electronic component are electrically linked to the fingers of the second set of fingers of the second electronic component,

the fingers of the second set of fingers of the first electronic component are electrically linked to the fingers of the first set of fingers of the second electronic component.

10. A method for fabricating the electronic component according to claim 1, said method comprising:

a step of supply of the part of the electronic component comprising the transistor provided with the control electrode and first and second electrodes, said part of the electronic component comprising the connection face intended to allow the formation of electrical connection terminals of the electronic component,

a step of for of the first, second and third electrical connection terminals of said electronic component at the level of the connection face such that;

the first electrical connection terminal is electrically linked to the first electrode of the transistor,

the second electrical connection terminal is electrically linked to the second electrode of the transistor and,

the third electrical connection terminal is electrically linked to the control electrode of the transistor,

a step of formation of the first set of electrically conductive fingers and of the second set of electrically conductive fingers such that;

the fingers of the first set of fingers and of the second set of fingers are interdigitated, at the level of the connection face, to form said at least a part of a capacitive component, and

the fingers of the first set of fingers are electrically linked to the first electrical connection terminal.

11. The method according to claim 10, wherein the step of formation of the first, second and third electrical connection terminals and the step of formation of the first set of electrically conductive fingers and of the second set of electrically conductive fingers are such that at least a part of the first electrical connection terminal, and at least a part of each of the fingers of the first set of fingers are formed simultaneously.

12. The method according to claim 11, wherein said at least a part of the first electrical connection terminal and said at least a part of each of the fingers of the first set of fingers are formed simultaneously by:

a step of formation of an electrically conductive layer on the connection face, then

a step of etching of said electrically conductive layer.

13. The method according to claim 12, wherein the step of etching of the electrically conductive layer is such that:

an electrically conductive member is formed for each of the first, second and third connection terminals, and

the fingers of the first set of fingers form, with the member of the first electrical connection terminal, a continuity of material.

14. The method according to claim 10, wherein the step of formation of the first, second and third electrical connection terminals comprises a step of production, for each of the first, second and third electrical connection terminals, of an electrically conductive member topped by electrically conductive pillars, and wherein at least a part of each of the fingers of the first and second sets of fingers and the pillars are formed simultaneously by growth according to a growth mask.