LOW CAPACITANCE TRANSIENT VOLTAGE SUPPRESSOR

• US 20200135714A1
• Filed: 10/26/2018
• Published: 04/30/2020
• Est. Priority Date: 10/26/2018
• Status: Active Grant

• Current Assignee: Alpha & Omega Semiconductor, Ltd.
• Original Assignee: Alpha & Omega Semiconductor, Ltd.
• Inventors: Mallikarjunaswamy, Shekar
• Granted Patent: US 10,825,805 B2
• Time in Patent Office: Days
• CPC Class Codes: H01L 27/0255 using diodes as protective elements
• CPC Class Codes: H01L 27/0262 including a PNP transistor and a NPN transistor, wherein each of said transistors has its base coupled to the collector of the other transistor, e.g. silicon controlled rectifier [SCR] devices
• CPC Class Codes: H01L 27/0641 without components of the field effect type
• CPC Class Codes: H01L 27/0814 Diodes only
• CPC Class Codes: H01L 27/082 including bipolar components only
• CPC Class Codes: H01L 29/402 Field plates
• CPC Class Codes: H01L 29/66098 Breakdown diodes
• CPC Class Codes: H01L 29/861 Diodes
• CPC Class Codes: H01L 29/87 Thyristor diodes, e.g. Shockley diodes, break-over diodes

Abstract

A transient voltage suppressor (TVS) device uses a punch-through silicon controlled rectifier (SCR) structure for the high-side steering diode and/or the low-side steering diode where the punch-through SCR structure realizes low capacitance at the protected node. In some embodiments, the breakdown voltage of the TVS device is tailored by connecting two or more forward biased diodes in series. The low capacitance TVS device can be configured for unidirectional or bidirectional applications. In some embodiments, the TVS device includes a MOS-triggered silicon controlled rectifier as the high-side steering diode. The breakdown voltage of the TVS device can be adjusted by adjusting the threshold voltage of the MOS transistor.

Claims

1. A transient voltage suppressing (TVS) device comprising:

a first high-side steering diode having an anode terminal coupled to a first protected node and a cathode terminal; and

a first low-side steering diode having a cathode terminal coupled to the first protected node and an anode terminal, wherein the first low-side steering diode comprises a punch-through silicon controlled rectifier, the punch-through silicon controlled rectifier including alternating p-type and n-type regions where the n-type region between a pair of p-type regions is substantially depleted at a bias voltage of zero volt.

2. The TVS device of claim 1, wherein the TVS device is fabricated on a semiconductor layer comprising at least a first epitaxial layer of a first conductivity type, the semiconductor including a plurality of active regions formed in the semiconductor layer, the active regions being isolated from each other by isolation structures, the first high-side steering diode being formed in a first active region and the first low-side steering diode being formed in a second active region, and wherein the punch-through silicon controlled rectifier of the first low-side steering diode is formed in the second active region and comprises:

a first doped region of a second conductivity type, opposite the first conductivity type, formed in the first epitaxial layer;

a first well of the second conductivity type formed in the first epitaxial layer spaced apart from the first doped region, wherein the first well is not biased to any electrical potential; and

a second doped region of the first conductivity type formed in the first well,

wherein the first doped region, the first epitaxial layer, the first well and the second doped region form the punch-through silicon controlled rectifier, the first doped region forming the anode and the second doped region forming the cathode of the punch-through silicon controlled rectifier, a portion of the first epitaxial layer between the first doped region and the first well being depleted at a bias voltage of zero volt.

3. The TVS device of claim 2, wherein the punch-through silicon controlled rectifier of the first low-side steering diode further comprises:

a third doped region of the second conductivity type formed in the first well and spaced apart from the second doped region, wherein the third doped region is not biased to any electrical potential.

4. The TVS device of claim 2, wherein the punch-through silicon controlled rectifier of the first low-side steering diode further comprises:

a second well region of the first conductivity type formed in the first epitaxial layer adjacent the first well and positioned between the first doped region and the first well.

5. The TVS device of claim 1, wherein the first high-side steering diode comprises a PN junction diode.

6. The TVS device of claim 1, wherein the first high-side steering diode comprises a punch-through silicon controlled rectifier, the punch-through silicon controlled rectifier including alternating p-type and n-type regions where the n-type region between a pair of p-type regions is substantially depleted at a bias voltage of zero volt.

7. The TVS device of claim 1, wherein the first high-side steering diode comprises a MOS-triggered silicon controlled rectifier, the MOS-triggered silicon controlled rectifier including alternating p-type and n-type regions and a diode-connected MOS transistor integrated therein to trigger the silicon controlled rectifier to turn on.

8. The TVS device of claim 1, wherein a threshold voltage of the MOS transistor is adjusted to adjust a breakdown voltage of the TVS device.

9. The TVS device of claim 1, wherein the cathode terminal of the first high-side steering diode and the anode terminal of the first low-side steering diode are connected to a ground potential, the TVS device being a unidirectional TVS device.

10. The TVS device of claim 1, wherein the TVS device comprises a bidirectional TVS device and the bidirectional TVS device further comprises:

a second high-side steering diode having an anode terminal coupled to a second protected node and a cathode terminal; and

a second low-side steering diode having a cathode terminal coupled to the second protected node and an anode terminal, wherein the second low-side steering diode comprises a punch-through silicon controlled rectifier, the punch-through silicon controlled rectifier including alternating p-type and n-type regions where the n-type region between a pair of p-type regions is substantially depleted at a bias voltage of zero volt,

wherein the cathode terminal of the first high-side steering diode is coupled to the anode terminal of the second low-side steering diode and the cathode terminal of the second high-side steering diode is coupled to the anode terminal of the first low-side steering diode.

11. The TVS device of claim 10, further comprising:

a clamp device coupled between the cathode terminal of the first high-side steering diode and the anode terminal of the first low-side steering diode, the clamp device comprising a diode-connected NMOS transistor integrated with a diode triggered silicon controlled rectifier (SCR) having an anode, a cathode, and a gate, wherein in response to a voltage applied to one of the first or second protected nodes exceeding a first voltage level, the diode-connected NMOS transistor triggers a current flow at the SCR and the SCR clamps the voltage at the respective protected node at a clamping voltage.

12. The TVS device of claim 1, wherein the high-side steering diode comprises:

a plurality of PN junction diodes connected in series, a first PN junction diode of the plurality of PN junction diodes having an anode terminal coupled to the first protected node and a cathode terminal coupled to the next PN junction diode in the series, and a last PN junction diode of the plurality of PN junction diodes having an anode terminal coupled to the cathode terminal of a previous PN junction diode in the series and a cathode terminal.

13. The TVS device of claim 1, wherein the TVS device is packaged in a chip-scale semiconductor package and the TVS device further comprises:

a metal pad coupled to the anode of the high-side steering diode and the cathode of the low-side steering diode, the metal pad being the protected node, the metal pad being configured as a copper pillar pad to receive a copper pillar bump to be formed thereon;

a dielectric layer formed over the metal pad; and

an opening formed in the dielectric layer for receiving the copper pillar bump to be formed on the metal pad.

14. The TVS device of claim 13, wherein the opening comprises a plurality of openings formed in the dielectric layer, the plurality of openings for receiving one or more copper pillar bump to be formed on the metal pad.

15. The TVS device of claim 13, wherein the metal pad comprises a plurality of metal pad portions spaced apart from each other, each metal pad portion having an opening formed thereon to receive one or more copper pillar bump to be formed on the metal pad portion.

16. The TVS device of claim 2, wherein the first high-side steering diode comprises a MOS-triggered silicon controlled rectifier formed in the first active region, the MOS-triggered silicon controlled rectifier comprising:

a fourth doped region of the second conductivity type formed in the first epitaxial layer;

a fifth doped region of the second conductivity type formed in the first epitaxial layer and being spaced apart from the fourth doped region, the fifth doped region having a lower doping level than the doping level of the fourth doped region;

a sixth doped region of the first conductivity type formed at least partially in the fifth doped region;

a seventh doped region of the first conductivity type formed in the fifth doped region and spaced apart from the sixth doped region;

a conductive gate formed above the semiconductor layer and insulated from the semiconductor layer by a gate dielectric layer, the conductive gate being positioned between the sixth doped region and the seventh doped region,

wherein the conductive gate, the sixth doped region and the seventh doped region form a MOS transistor with the fifth doped region being the body of the MOS transistor, the sixth doped region being electrically connected to the conductive gate to form a diode-connected MOS transistor; and

wherein the fourth doped region, the first epitaxial layer, the fifth doped region and the seventh doped region form the silicon controlled rectifier, the diode-connected MOS transistor being turned on to trigger the silicon controlled rectifier to turn on.

17. The TVS device of claim 16, wherein the MOS-triggered silicon controlled rectifier further comprises:

a third well region of the first conductivity type formed in the first epitaxial layer adjacent the fifth doped region and positioned between the fourth doped region and the fifth doped region.

18. A transient voltage suppressing (TVS) device comprising:

a semiconductor layer comprising a first epitaxial layer of a first conductivity type, a first buried layer of a second conductivity type, opposite the first conductivity type, formed on the first epitaxial layer, and a second epitaxial layer of the second conductivity type formed on the first buried layer;

a plurality of active regions formed in the semiconductor layer, the active regions being isolated from each other by isolation structures;

a high-side steering diode formed in a first active region and having an anode terminal coupled to a first protected node and a cathode terminal;

a low-side steering diode formed in a second active region of the plurality of active regions and having a cathode terminal coupled to a second protected node and an anode terminal;

wherein the first low-side steering diode comprises a punch-through silicon controlled rectifier, the punch-through silicon controlled rectifier comprising;

a first doped region of the first conductivity type formed in the second epitaxial layer;

a first well of the first conductivity type formed in the second epitaxial layer spaced apart from the first doped region, wherein the first well is not biased to any electrical potential; and

a second doped region of the second conductivity type formed in the first well,

wherein the first doped region, the second epitaxial layer, the first well and the second doped region form the punch-through silicon controlled rectifier, the first doped region forming the anode and the second doped region forming the cathode of the punch-through silicon controlled rectifier, a portion of the second epitaxial layer between the first doped region and the first well being depleted at a bias voltage of zero volt.

19. The TVS device of claim 18, wherein the punch-through silicon controlled rectifier of the first low-side steering diode further comprises:

a third doped region of the first conductivity type formed in the first well and adjacent the second doped region, wherein the third doped region is not biased to any electrical potential.

20. The TVS device of claim 18, wherein the first high-side steering diode comprises a MOS-triggered silicon controlled rectifier formed in the first active region, the MOS-triggered silicon controlled rectifier comprising:

a fourth doped region of the second conductivity type formed in the first epitaxial layer;

a fifth doped region of the second conductivity type formed in the first epitaxial layer and being spaced apart from the fourth doped region, the fifth doped region having a lower doping level than the doping level of the fourth doped region;

a sixth doped region of the first conductivity type formed at least partially in the fifth doped region;

a seventh doped region of the first conductivity type formed in the fifth doped region and spaced apart from the sixth doped region;

a conductive gate formed above the semiconductor layer and insulated from the semiconductor layer by a gate dielectric layer, the conductive gate being positioned between the sixth doped region and the seventh doped region,

wherein the conductive gate, the sixth doped region and the seventh doped region form a MOS transistor with the fifth doped region being the body of the MOS transistor, the sixth doped region being electrically connected to the conductive gate to form a diode-connected MOS transistor; and

wherein the fourth doped region, the first epitaxial layer, the fifth doped region and the seventh doped region form the silicon controlled rectifier, the diode-connected MOS transistor being turned on to trigger the silicon controlled rectifier to turn on.

21. The TVS device of claim 20, wherein a threshold voltage of the MOS transistor is adjusted to adjust a breakdown voltage of the TVS device.

22. The TVS device of claim 18, wherein the high-side steering diode comprises:

a plurality of PN junction diodes connected in series, a first PN junction diode of the plurality of PN junction diodes having an anode terminal coupled to the first protected node and a cathode terminal coupled to the next PN junction diode in the series, and a last PN junction diode of the plurality of PN junction diodes having an anode terminal coupled to the cathode terminal of a previous PN junction diode in the series and a cathode terminal.

23. The TVS device of claim 18, wherein the first high-side steering diode comprises a punch-through silicon controlled rectifier, the punch-through silicon controlled rectifier including alternating p-type and n-type regions where the n-type region between a pair of p-type regions is substantially depleted at a bias voltage of zero volt.