IMAGE SENSOR AND METHOD OF MAKING
First Claim
1. An image sensor comprising:
- a substrate;
a first photodiode (PD) having a first size in the substrate;
a second PD having a second size in the substrate, wherein the first size is different from the second size;
a first buffer layer over the substrate;
a shield layer over the first buffer, wherein the first buffer layer and the shield layer define a first recess aligned with the first PD and a second recess aligned with the second PD; and
a flicker reduction layer in the first recess, wherein the second recess is free of the flicker reduction layer.
1 Assignment
0 Petitions
Accused Products
Abstract
An image sensor includes a substrate and a first photodiode (PD) having a first size in the substrate. The image sensor further includes a second PD having a second size in the substrate, wherein the first size is different from the second size. The image sensor further includes a first buffer layer over the substrate. The image sensor further includes a shield layer over the first buffer, wherein the first buffer layer and the shield layer define a first recess aligned with the first PD and a second recess aligned with the second PD. The image sensor further includes a flicker reduction layer in the first recess, wherein the second recess is free of the flicker reduction layer.
-
Citations
20 Claims
-
1. An image sensor comprising:
-
a substrate; a first photodiode (PD) having a first size in the substrate; a second PD having a second size in the substrate, wherein the first size is different from the second size; a first buffer layer over the substrate; a shield layer over the first buffer, wherein the first buffer layer and the shield layer define a first recess aligned with the first PD and a second recess aligned with the second PD; and a flicker reduction layer in the first recess, wherein the second recess is free of the flicker reduction layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. An image sensor comprising:
-
a substrate; a plurality of large photodiodes (LPDs) in the substrate; a plurality of small photodiodes (SPDs) in the substrate; a buffer layer over the substrate; a shield layer over the buffer layer, wherein the shield layer and the buffer layer define a plurality of recesses, the plurality of recesses including a first set of recesses and a second set of recesses, each recess of the first set of recesses is aligned with a corresponding LPD of the plurality of LPDs, and each recess of the second set of recesses is aligned with a corresponding SPD of the plurality of SPDs; and a flicker reduction layer in each recess of the second set of recesses, wherein each recess of the first set of recesses is free of the flicker reduction layer. - View Dependent Claims (12, 13, 14, 15)
-
-
16. A method of making an image sensor, the method comprising:
-
depositing a buffer layer over a substrate, wherein the substrate comprises a first photodiode (PD) and a second PD; depositing a shield layer over the buffer layer; etching the buffer layer and the shield layer to define a first recess aligned with the first PD and a second recess aligned with the second PD; depositing a flicker reduction layer in the first recess and in the second recess; and etching the flicker reduction layer to remove the flicker reduction layer from the first recess. - View Dependent Claims (17, 18, 19, 20)
-
Specification