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DIGITAL X-RAY DETECTOR AND THIN-FILM TRANSISTOR ARRAY SUBSTRATE FOR THE SAME

  • US 20200135796A1
  • Filed: 10/28/2019
  • Published: 04/30/2020
  • Est. Priority Date: 10/31/2018
  • Status: Active Grant
First Claim
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1. A thin-film transistor array substrate for a digital X-ray detector, comprising:

  • a base substrate;

    a thin-film transistor disposed on the base substrate, wherein the thin-film transistor includes an active layer, a gate electrode, and a first electrode and a second electrode connected to the active layer;

    a first protective layer disposed on the thin-film transistor;

    a PIN diode disposed on the first protective layer, wherein the PIN diode includes a lower electrode connected to the thin-film transistor, a PIN layer on the lower electrode, and an upper electrode on the PIN layer;

    a second protective layer covering at least a portion of the PIN diode, wherein the thin-film transistor is not covered with the second protective layer;

    a bias electrode disposed on the PIN diode and connected to the upper electrode; and

    a third protective layer disposed on the bias electrode, wherein the third protective layer covers the thin-film transistor and the PIN diode.

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