METAL-OXIDE-METAL CAPACITOR STRUCTURE

• US 20200135842A1
• Filed: 04/02/2019
• Published: 04/30/2020
• Est. Priority Date: 10/30/2018
• Status: Active Grant

• Current Assignee: Powerchip Semiconductor Manufacturing Corp. (Powerchip Technology Corporation)
• Original Assignee: Powerchip Technology Corporation
• Inventors: Chen, Chun-Sheng
• Granted Patent: US 10,672,863 B2
• Time in Patent Office: Days
• CPC Class Codes: H01L 28/60 Electrodes

Abstract

The present invention provides a metal-oxide-metal (MOM) capacitor including a first metal layer and a second metal layer. The first metal layer includes a plurality of first metal stripes and second metal stripes extending along a first direction and a plurality of first metal jogs and second metal jogs extending along a second direction. Each of the first metal jogs is connected to one of the first metal stripes and each of the second metal jogs is connected to one of the second metal stripes. The second metal layer includes a plurality of third metal stripes and fourth metal stripes extending along the first direction and includes a plurality of third metal jogs and fourth metal jogs. Each of the third metal jogs is connected to one of the third metal stripes and each of the fourth metal jogs is connected to one of the fourth metal stripes.

Claims

1. A metal-oxide-metal (MOM) capacitor, comprising:

a first metal layer, comprising;

a plurality of first metal stripes and a plurality of second metal stripes extending along a first direction, the first metal stripes and the second metal stripes being arranged side by side alternately along a second direction, wherein the first direction intersects the second direction;

a plurality of first metal jogs extending along the second direction, each of the first metal jogs connecting to one of the first metal stripes; and

a plurality of second metal jogs extending along the second direction, each of the second metal jogs connecting to one of the second metal stripes; and

a second metal layer disposed on the first metal layer, the second metal layer comprising;

a plurality of third metal stripes and a plurality of fourth metal stripes extending along the first direction, the third metal stripes and the fourth metal stripes being arranged side by side alternately along the second direction;

a plurality of third metal jogs extending along the second direction, each of the third metal jogs connecting to one of the third metal stripes; and

a plurality of fourth metal jogs extending along the second direction, each of the fourth metal jogs connecting to one of the fourth metal stripes respectively;

wherein on a projection plane, a projection of each of the third metal stripes corresponds to a projection of one of the second metal stripes, a projection of each of the fourth metal stripes corresponds to a projection of one of the first metal stripes, the first metal stripes are electrically connected to the third metal stripes but not electrically connected to the second metal stripes, and the second metal stripes are electrically connected to the fourth metal stripes.

2. The metal-oxide-metal capacitor of claim 1, further comprising:

a plurality of first connection element disposed respectively between one of the first metal jogs and one of the third metal jogs, each of the first connection element being used for electrically connecting the first metal jog and the third metal jog which are respectively located at an upper end and a lower end of the first connection element; and

a plurality of second connection element disposed respectively between one of the second metal jogs and one of the fourth metal jogs, each of the second connection elements being used for electrically connecting the second metal jog and the fourth metal jog which are respectively located at an upper end and a lower end of the second connection element.

3. The metal-oxide-metal capacitor of claim 2, wherein each of the first connection elements and each of the second connection elements is a metal plug.

4. The metal-oxide-metal capacitor of claim 1, wherein more than one of the first metal jogs and more than one of the second metal jogs are disposed between one of the first metal stripes and an adjacent second metal stripe of the second metal stripes, and the more than one of the first metal jogs and the more than one of the second metal jogs are arranged side by side alternately along the first direction.

5. The metal-oxide-metal capacitor of claim 1, wherein one of the first metal stripes is connected to more than one of the first metal jogs, and the more than one of the first metal jogs are disposed on both sides of the first metal stripe and are mirror-symmetric by regarding the first metal stripe as a symmetry line.

6. The metal-oxide-metal capacitor of claim 5, wherein an extending line of any one of the first metal jogs along the second direction and an extending line of any one of the second metal jogs along the second direction are misaligned with each other.

7. The metal-oxide-metal capacitor of claim 1, wherein one of the first metal stripes is connected to more than one of the first metal jogs, the more than one of the first metal jogs are disposed on both sides of the first metal stripe, and extending lines of the more than one of the first metal jogs along the second direction are misaligned with each other.

8. The metal-oxide-metal capacitor of claim 7, wherein the extending lines of each of the more than one of the first metal jogs along the second direction overlaps at least one of the second metal jogs.

9. The metal-oxide-metal capacitor of claim 1, wherein the first metal layer further comprises:

a first bus line extending along the second direction and connected to the first metal stripes; and

a second bus line extending along the second direction and connected to the second metal stripes;

wherein the first metal stripes and the second metal stripes are located between the first bus line and the second bus line.

10. The metal-oxide-metal capacitor of claim 9, wherein the second metal layer further comprises:

a third bus line extending along the second direction and connected to the third metal stripes; and

a fourth bus line extending along the second direction and connected to the fourth metal stripes;

wherein the third metal stripes and the fourth metal stripes are located between the third bus line and the fourth bus line.

11. The metal-oxide-metal capacitor of claim 10, wherein on a projection plane, at least a portion of a projection of the first bus line overlaps a portion of a projection of the fourth bus line, and at least a portion of a projection of the second bus line overlaps a portion of a projection of the third bus line.

12. The metal-oxide-metal capacitor of claim 10, wherein on a projection plane, at least a portion of a projection of the first bus line overlaps a portion of a projection of the third bus line, and at least a portion of a projection of the second bus line overlaps a portion of a projection of the fourth bus line.