NANOSHEET FET BOTTOM ISOLATION
First Claim
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1. A semiconductor device comprising:
- a rare earth material formed on a substrate;
an isolation layer formed at an interface of the rare earth material and the substrate;
channel layers formed over the isolation layer; and
source or drain (S/D) regions formed on the isolation layer.
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Abstract
A technique relates to a semiconductor device. A rare earth material is formed on a substrate. An isolation layer is formed at an interface of the rare earth material and the substrate. Channel layers are formed over the isolation layer. Source or drain (S/D) regions are formed on the isolation layer.
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Citations
20 Claims
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1. A semiconductor device comprising:
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a rare earth material formed on a substrate; an isolation layer formed at an interface of the rare earth material and the substrate; channel layers formed over the isolation layer; and source or drain (S/D) regions formed on the isolation layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification