SELF-ALIGNED CONTACT WITH METAL-INSULATOR TRANSISTION MATERIALS
First Claim
1. A method for forming a semiconductor device, the method comprising:
- forming a dielectric cap over a conductive gate;
forming a source or drain (S/D) region adjacent to the conductive gate;
forming a dielectric liner over the dielectric cap and the (S/D) region such that a first portion of the dielectric liner is on a surface of the (S/D) region, the dielectric liner comprising a metal-insulator transition material; and
metalizing the first portion of the dielectric liner.
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Abstract
Embodiments of the present invention are directed to techniques for forming a self-aligned contact liner using metal-insulator transition materials. The self-aligned contact architecture described herein prevents a short between the gate and the source/drain, even when the self-aligned contact (SAC) cap has eroded to the point where the gate is exposed. In a non-limiting embodiment of the invention, a dielectric cap is formed over a conductive gate. A source or drain region is formed adjacent to the conductive gate. A dielectric liner is formed over the dielectric cap and the source or drain region such that a first portion of the dielectric liner is on a surface of the source or drain region. The dielectric liner includes a metal-insulator transition material. The first portion of the dielectric liner is metalized via germanium oxide sublimation.
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Citations
20 Claims
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1. A method for forming a semiconductor device, the method comprising:
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forming a dielectric cap over a conductive gate; forming a source or drain (S/D) region adjacent to the conductive gate; forming a dielectric liner over the dielectric cap and the (S/D) region such that a first portion of the dielectric liner is on a surface of the (S/D) region, the dielectric liner comprising a metal-insulator transition material; and metalizing the first portion of the dielectric liner. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for forming a semiconductor device, the method comprising:
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conformally forming a metal-insulator transition material on a surface of a conductive gate and on a surface of a (S/D) region; and selectively metalizing a portion of the metal-insulator transition material in contact with the surface of the (S/D) region. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A semiconductor device comprising:
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a dielectric cap over a conductive gate; a (S/D) region adjacent to the conductive gate; and a conformal liner formed adjacent to a sidewall of the dielectric cap and on the (S/D) region; wherein a first portion of the conformal liner is on a surface of the conductive gate, the first portion comprising a metal-doped germanium oxide; and wherein a second portion of the conformal liner is on the (S/D) region, the second portion comprising a silicide or a germanide. - View Dependent Claims (18, 19, 20)
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Specification