Optoelectronic Component Having a Layer with Lateral Offset Inclined Side Surfaces

• US 20200135964A1
• Filed: 12/30/2019
• Published: 04/30/2020
• Est. Priority Date: 11/28/2014
• Status: Active Grant

• Current Assignee: Osram Opto Semiconductors GmbH (Ams-Osram AG)
• Original Assignee: Osram Opto Semiconductors GmbH (Ams-Osram AG)
• Inventors: Lell, Alfred, Gerhard, Sven
• Granted Patent: US 11,031,524 B2
• Time in Patent Office: Days
• CPC Class Codes: H01L 33/0075 comprising nitride compounds
• CPC Class Codes: H01L 33/0095 Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
• CPC Class Codes: H01L 33/20 with a particular shape, e.g. curved or truncated substrate
• CPC Class Codes: H01S 5/0202 Cleaving
• CPC Class Codes: H01S 5/0207 Substrates having a special shape
• CPC Class Codes: H01S 5/0217 Removal of the substrate
• CPC Class Codes: H01S 5/22 having a ridge or stripe structure

Abstract

An optoelectronic component and a method for producing an optoelectronic component are disclosed. In an embodiment the optoelectronic component includes a layer structure having an active zone for producing electromagnetic radiation, wherein the active zone is arranged in a first plane, wherein a recess is introduced into the surface of the layer structure, wherein the recess adjoins an end surface of the component, wherein the end surface is arranged in a second plane, wherein the second plane is arranged substantially perpendicularly to the first plane, wherein the recess has a bottom surface and a lateral surface wherein the lateral surface is arranged substantially perpendicularly to the end surface, wherein the lateral surface is arranged tilted at an angle not equal to 90° to the first plane of the active zone, and wherein the bottom surface is arranged in the region of the first plane of the active zone.

Claims

1. An optoelectronic component comprising:

a layer structure, comprising an active zone for generating an electromagnetic radiation, wherein the active zone is arranged in a first plane, wherein a surface of the layer structure has a recess formed therein, wherein the recess adjoins an end face of the component, wherein the end face is arranged in a second plane, wherein the second plane is substantially perpendicular to the first plane, wherein the recess comprises a bottom recess face and a first side recess face, wherein the first side recess face is arranged substantially perpendicularly to the end face, wherein the first side recess face is arranged in a manner inclined at an angle different from 90°

with respect to the plane of the active zone, wherein the bottom recess face is arranged in a region of the first plane of the active zone, wherein the recess further comprises a second side recess face, and wherein the second side recess face is arranged opposite with respect to the first side recess face, wherein the first and second side recess faces are arranged at different angles with respect to the plane of the active zone.

2. The component according to claim 1, wherein the bottom recess face is arranged at a depth of between 100 nm and 800 nm below the surface of the layer structure.

3. The component according to claim 1, wherein the first side recess face is arranged in a manner inclined at an angle between 95°

and 160°

with respect to the plane of the active zone.

4. The component according to claim 1, wherein the second side recess face is arranged in a manner inclined at an angle between 95°

and 160°

with respect to the plane of the active zone.

5. The component according to claim 1, wherein at least one of the first side recess face or the second side recess face is arranged in a manner inclined at an angle between 98°

and 130°

with respect to the plane of the active zone.

6. The component according to claim 1, wherein at least one of the first side recess face or the second side recess face comprises:

a first face section arranged substantially perpendicularly relative to the first plane; and

an inclined second face section, wherein the inclined second face section is arranged in an upper face section of the at least one of the first side recess face or the second side recess face in relation to a depth of the at least one of the first side recess face or the second side recess face, and wherein the first face section is arranged in a lower region of the at least one of the first side recess face or the second side recess face.

7. The component according to claim 1, wherein at least one of the first side recess face or the second side recess face comprises:

a first face section arranged substantially perpendicularly relative to the first plane; and

an inclined second face section, wherein the inclined second face section is arranged in a lower face section of the at least one of the first side recess face or the second side recess face in relation to a depth of the at least one of the first side recess face or the second side recess face, and wherein the first face section is arranged in an upper region of the at least one of the first side recess face or the second side recess face.

8. The component according to claim 1, wherein the recess comprises at least one rounded transition disposed in a plane parallel to the second plane and disposed between at least one of the first side recess face or the second side recess face and at least one of a top side of the layer structure or a bottom face of the recess.

9. The component according to claim 1, wherein at least one of the first side recess face or the second side recess face comprises a stepped shape comprising at least two side sections, wherein each of the at least two side sections are arranged in a laterally offset fashion in relation to other ones of the at least two side sections, wherein the at least two side sections are each connected to one another via a bottom face, and wherein at least one side section of the at least two side sections is formed as an inclined side face.

10. The component according to claim 1, wherein the recess has a width in the second plane that is in a range of 10 μ

m to 200 μ

m.

11. The component according to claim 1, wherein the recess has a distance from a ridge, wherein the distance is in a range of 10 μ

m to 150 μ

m.

12. The component according to claim 1, wherein a mesa trench is provided, wherein the mesa trench is arranged in the second plane in a laterally offset fashion with respect to the recess between a side of the component and the recess.

13. The component according to claim 1, wherein the first side recess face and the second side recess face each comprise:

a first face section arranged substantially perpendicularly relative to the first plane; and

an inclined second face section, wherein the inclined second face section of each of the first side recess face and the second side recess face is arranged in an upper face section of a respective one of the first side recess face and the second side recess face in relation to a depth of the respective one of the first side recess face and the second side recess face, and wherein the first face section of each of the first side recess face and the second side recess face is arranged in a lower region of the respective one of the first side recess face and the second side recess face.

14. The component according to claim 1, wherein the first side recess face and the second side recess face each comprise:

a first face section arranged substantially perpendicularly relative to the first plane; and

an inclined second face section, wherein the inclined second face section of each of the first side recess face and the second side recess face is arranged in a lower face section of a respective one of the first side recess face and the second side recess face in relation to a depth of the respective one of the first side recess face and the second side recess face, and wherein the first face section of each of the first side recess face and the second side recess face is arranged in an upper region of a respective one of the first side recess face and the second side recess face.

15. A method for producing the component according to claim 1, wherein the recess is introduced into the layer structure with the aid of an etching process, wherein a lateral widening of an etching opening of an etching mask is at least partly carried out during the etching process, such that the recess is introduced into the layer structure, and resulting in the recess comprises at least one side face of the recess arranged in an inclined manner.

16. The method according to claim 15, wherein etching masks of different hardnesses are used in order to produce a recess comprising at least one inclined side face.

17. The method according to claim 16, wherein a first etching mask that is softer than another mask of the etching masks is a mask composed of photoresist or SiNx or a semiconductor material or is formed from metal, wherein the first etching mask is removed in particular at least partly laterally during the etching.