MAGNETORESISTIVE RANDOM ACCESS MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME
First Claim
1. An MRAM device comprising:
- a first electrode on an upper surface of a substrate;
a first magnetic layer on the first electrode;
a tunnel barrier structure on the first magnetic layer, the tunnel barrier structure including a first tunnel barrier layer and a second tunnel barrier layer that are sequentially stacked on the first magnetic layer and have different resistivity distributions from each other along a horizontal direction that is parallel to the upper surface of the substrate;
a second magnetic layer on the tunnel barrier structure; and
a second electrode on the second magnetic layer.
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Abstract
The methods of manufacturing an MRAM device and MRAM devices are provided. The methods may include forming a first electrode on an upper surface of a substrate, forming a first magnetic layer on the first electrode, forming a tunnel barrier structure on the first magnetic layer, forming a second magnetic layer on the tunnel barrier structure, and forming a second electrode on the second magnetic layer. The tunnel barrier structure may include a first tunnel barrier layer and a second tunnel barrier layer that are sequentially stacked on the first magnetic layer and may have different resistivity distributions from each other along a horizontal direction that may be parallel to the upper surface of the substrate.
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8 Claims
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1. An MRAM device comprising:
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a first electrode on an upper surface of a substrate; a first magnetic layer on the first electrode; a tunnel barrier structure on the first magnetic layer, the tunnel barrier structure including a first tunnel barrier layer and a second tunnel barrier layer that are sequentially stacked on the first magnetic layer and have different resistivity distributions from each other along a horizontal direction that is parallel to the upper surface of the substrate; a second magnetic layer on the tunnel barrier structure; and a second electrode on the second magnetic layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification