MAGNETIC DEVICE AND MAGNETIC RANDOM ACCESS MEMORY
First Claim
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1. A spin-orbit-torque (SOT) magnetic device, comprising:
- a bottom metal layer;
a first magnetic layer, as a magnetic free layer, disposed over the bottom metal layer;
a spacer layer disposed over the first magnetic layer; and
a second magnetic layer disposed over the spacer layer,wherein the first magnetic layer includes a lower magnetic layer, a middle layer made of non-magnetic layer and an upper magnetic layer.
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Abstract
A spin-orbit-torque (SOT) magnetic device includes a bottom metal layer, a first magnetic layer, as a magnetic free layer, disposed over the bottom metal layer, a spacer layer disposed over the first magnetic layer, and a second magnetic layer disposed over the spacer layer. The first magnetic layer includes a lower magnetic layer, a middle layer made of non-magnetic layer and an upper magnetic layer.
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Citations
20 Claims
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1. A spin-orbit-torque (SOT) magnetic device, comprising:
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a bottom metal layer; a first magnetic layer, as a magnetic free layer, disposed over the bottom metal layer; a spacer layer disposed over the first magnetic layer; and a second magnetic layer disposed over the spacer layer, wherein the first magnetic layer includes a lower magnetic layer, a middle layer made of non-magnetic layer and an upper magnetic layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A spin-orbit-torque (SOT) magnetic device, comprising:
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a bottom metal layer; a first magnetic layer, as a free magnetic layer, disposed under the bottom metal layer; a spacer layer disposed under the first magnetic layer; and a second magnetic layer disposed under the spacer layer, wherein the first magnetic layer includes a lower magnetic layer, a middle layer made of non-magnetic layer and an upper magnetic layer.
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20. A method of manufacturing a spin-orbit-torque (SOT) magnetic device, comprising:
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forming bottom via contacts in a first interlayer dielectric layer; forming a stacked layer including a bottom metal layer, a first magnetic layer, a spacer layer and a second magnetic layer; patterning the stacked layer to form a line pattern; and patterning the first magnetic layer, the spacer layer and the second magnetic layer to form a SOT film stack, wherein the first magnetic layer includes a lower magnetic layer, a middle layer made of non-magnetic layer and an upper magnetic layer.
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Specification