FULLY ALIGNED SEMICONDUCTOR DEVICE WITH A SKIP-LEVEL VIA

• US 20200136028A1
• Filed: 10/08/2019
• Published: 04/30/2020
• Est. Priority Date: 10/29/2018
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Lanzillo, Nicholas A., Briggs, Benjamin D., Yang, Chih-Chao, Chen, Hsueh-Chung, Clevenger, Lawrence A.
• Granted Patent: US 10,741,751 B2
• Time in Patent Office: Days
• CPC Class Codes: H10B 61/00 Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
• CPC Class Codes: H10N 50/01 Manufacture or treatment
• CPC Class Codes: H10N 50/80 Constructional details
• CPC Class Codes: H10N 50/85 Magnetic active materials

Abstract

A semiconductor structure includes a memory element disposed on a first metal layer. A first cap layer is disposed on the first metal layer and sidewalls of the memory element. A first dielectric layer is disposed on a top surface of the first cap layer on the first metal layer and a portion of the first cap layer on the sidewalls of the memory element. A second metal layer is disposed on the first dielectric layer and sidewalls of the first cap layer. A second cap layer is disposed on a top surface of the second metal layer. A second dielectric layer is disposed on the second cap layer. A via is in the second dielectric layer and exposes a top surface of the memory element. A third metal layer is disposed on the second dielectric layer and in the via.

Claims

1. A semiconductor structure comprising:

a memory element disposed on a first metal layer;

a first cap layer disposed on the first metal layer and sidewalls of the memory element;

a first dielectric layer disposed on a top surface of the first cap layer on the first metal layer and a portion of the first cap layer on the sidewalls of the memory element;

a second metal layer disposed on the first dielectric layer and sidewalls of the first cap layer;

a second cap layer disposed on a top surface of the second metal layer;

a second dielectric layer disposed on the second cap layer;

a via in the second dielectric layer and exposes a top surface of the memory element; and

a third metal layer disposed on the second dielectric layer and in the via.

2. The semiconductor structure according to claim 1, wherein the first metal layer is part of an interlevel dielectric level which corresponds to a first interlevel dielectric level.

3. The semiconductor structure according to claim 2, wherein the second metal layer on the first dielectric layer is part of an interlevel dielectric level which corresponds to a second interlevel dielectric level.

4. The semiconductor structure according to claim 3, wherein the third metal layer on the second dielectric layer and fills the via is part of an interlevel dielectric level which corresponds to a third interlevel dielectric level.

5. The semiconductor structure according to claim 1, wherein the first metal layer, the second metal layer and the third metal layer are independently selected from the group consisting of aluminum, tungsten, copper and cobalt.

6. The semiconductor structure according to claim 1, wherein the first dielectric layer and the second dielectric layer independently comprise a low-k dielectric material or an ultra low-k dielectric material.

7. The semiconductor structure according to claim 1, wherein the memory element is part of a magnetoresistive random-access memory device and includes a magnetic tunnel junction element formed between a top electrode and a bottom electrode.

8. The semiconductor structure according to claim 7, wherein the first metal layer, the second metal layer and the third metal layer are the same metal material.

9. The semiconductor structure according to claim 1, wherein the first cap layer has a thickness ranging from about 3 to about 20 nanometers (nm).

10. The semiconductor structure according to claim 1, which is a front-end-of-line device.

20. The integrated circuit according to claim 1, wherein the semiconductor structure is a front-end-of-line device.

11. An integrated circuit comprising:

one or more semiconductor structures, wherein one of the semiconductor structures comprises;

a memory element disposed on a first metal layer;

a first cap layer disposed on the first metal layer and sidewalls of the memory element;

a first dielectric layer disposed on a top surface of the first cap layer on the first metal layer and a portion of the first cap layer on the sidewalls of the memory element;

a second metal layer disposed on the first dielectric layer and sidewalls of the first cap layer;

a second cap layer disposed on a top surface of the second metal layer;

a second dielectric layer disposed on the second cap layer;

a via in the second dielectric layer and exposes a top surface of the memory element; and

a third metal layer disposed on the second dielectric layer and in the via.

12. The integrated circuit according to claim 11, wherein the first metal layer is part of an interlevel dielectric level which corresponds to a first interlevel dielectric level.

13. The integrated circuit according to claim 12, wherein the second metal layer on the first dielectric layer is part of an interlevel dielectric level which corresponds to a second interlevel dielectric level.

14. The integrated circuit according to claim 13, wherein the third metal layer on the second dielectric layer and fills the via is part of an interlevel dielectric level which corresponds to a third interlevel dielectric level.

15. The integrated circuit according to claim 11, wherein the first metal layer, the second metal layer and the third metal layer are independently selected from the group consisting of aluminum, tungsten, copper and cobalt.

16. The integrated circuit according to claim 11, wherein the first dielectric layer and the second dielectric layer independently comprise a low-k dielectric material or an ultra low-k dielectric material.

17. The integrated circuit according to claim 11, wherein the memory element is part of a magnetoresistive random-access memory device and includes a magnetic tunnel junction element formed between a top electrode and a bottom electrode.

18. The integrated circuit according to claim 17, wherein the first metal layer, the second metal layer and the third metal layer are the same metal material.

19. The integrated circuit according to claim 11, wherein the first cap layer has a thickness ranging from about 3 to about 20 nm.