Segmented Slot Contacts for Improving Performance in Phase-Change Material (PCM) Radio Frequency (RF) Switches
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Abstract
A radio frequency (RF) switch includes a phase-change material (PCM) and a heating element underlying an active segment of the PCM, the PCM and heating element being situated over a substrate. A contact dielectric is over the PCM. PCM contacts have upper portions and uniform plate slot lower portions. The uniform plate slot lower portions have a total plate resistance RPLATE, and a total plate slot interface resistance RPLATE-INT. The upper portions have a total capacitance CUPPER to the uniform plate slot lower portions, and the PCM has a total capacitance CPCM to the substrate. The uniform plate slot lower portions significantly reduce a product of (RPLATE+RPLATE-INT) and (CUPPER+CPCM). As an alternative to the uniform plate slot lower portions, PCM contacts have segmented lower portions. The segmented lower portions significantly reduce CUPPER.
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Citations
42 Claims
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1-22. -22. (canceled)
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23. :
- A radio frequency (RF) switch comprising;
a phase-change material (PCM) and a heating element approximately underlying an active segment of said PCM, said PCM and heating element being situated over a substrate; a contact dielectric over said PCM; PCM contacts comprising upper portions and segmented lower portions, wherein said segmented lower portions comprise approximately square segments; said segmented lower portions having a total segmented interface resistance RSEG-INT; said upper portions having a total capacitance CUPPER to said segmented lower portions; said segmented lower portions resulting in significantly reducing said total capacitance CUPPER. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
- A radio frequency (RF) switch comprising;
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34. :
- A radio frequency (RF) switch comprising;
a phase-change material (PCM) and a heating element, said PCM and heating element being situated over a substrate; PCM contacts comprising upper portions and segmented lower portions; said upper portions having a total capacitance CUPPER to said segmented lower portions, wherein said segmented lower portions comprise approximately square segments so as to reduce said total capacitance CUPPER. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41, 42)
- A radio frequency (RF) switch comprising;
Specification