CAPACITOR COOLING STRUCTURE AND LASER APPARATUS

• US 20200136336A1
• Filed: 12/30/2019
• Published: 04/30/2020
• Est. Priority Date: 08/07/2017
• Status: Active Grant

• Current Assignee: Gigaphoton, Inc. (Komatsu Ltd.)
• Original Assignee: Gigaphoton, Inc. (Komatsu Ltd.)
• Inventors: KATSUUMI, Hisakazu, FUJIMOTO, Junichi, TANAKA, Satoshi
• Granted Patent: US 11,050,210 B2
• Time in Patent Office: Days
• CPC Class Codes: G03F 7/70025 by lasers
• CPC Class Codes: H01G 2/08 Cooling arrangements; Heating arrangements; Ventilating arrangements
• CPC Class Codes: H01S 3/032 for confinement of the discharge, e.g. by special features of the discharge constricting tube
• CPC Class Codes: H01S 3/034 Optical devices within, or forming part of, the tube, e.g. windows, mirrors reflectors having variable properties or positions for initial adjustment of the resonator H01S3/086
• CPC Class Codes: H01S 3/036 Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube H01S3/031 takes precedence
• CPC Class Codes: H01S 3/0384 Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor
• CPC Class Codes: H01S 3/041 for gas lasers H01S3/0401 takes precedence
• CPC Class Codes: H01S 3/09702 Details of the driver electronics and electric discharge circuits
• CPC Class Codes: H01S 3/0971 transversely excited H01S3/0975 takes precedence
• CPC Class Codes: H01S 3/0975 using inductive or capacitive excitation
• CPC Class Codes: H01S 3/134 in gas lasers

Abstract

To cool a capacitor including a first electrode and a second electrode, a capacitor cooling structure includes: a conducting part electrically connected with the first electrode; an insulating part that has a first surface including a first position and a second surface including a second position, and is connected with the conducting part at the first position; a first fastening part configured to fasten the conducting part and the insulating part to each other; and a cooling part connected with the second position facing the first position, the conducting part and the cooling part being electrically insulated from each other by the insulating part.

Claims

1. A capacitor cooling structure for a capacitor including a first electrode and a second electrode, the capacitor cooling structure comprising:

a conducting part electrically connected with the first electrode;

an insulating part that has a first surface including a first position and a second surface including a second position, and is connected with the conducting part at the first position;

a first fastening part configured to fasten the conducting part and the insulating part; and

a cooling part connected with the second position facing the first position,

the conducting part and the cooling part being electrically insulated from each other by the insulating part.

2. The capacitor cooling structure according to claim 1, wherein the conducting part and the insulating part contact each other through a metal sheet.

3. The capacitor cooling structure according to claim 1, wherein the conducting part and the insulating part contact each other through a resin sheet.

4. The capacitor cooling structure according to claim 1, wherein the insulating part covers one end of the conducting part.

5. The capacitor cooling structure according to claim 1, wherein the insulating part covers one end of the cooling part.

6. The capacitor cooling structure according to claim 1, wherein

the insulating part contains aluminum oxide, and

the first fastening part contains an alloy containing nickel and cobalt.

7. The capacitor cooling structure according to claim 1, wherein part of the first fastening part is brazed to the insulating part.

8. The capacitor cooling structure according to claim 1, wherein

the conducting part has a first bolt hole at which a female screw is formed, and

the first fastening part includes a first part brazed to the insulating part and a second part at which a male screw to be screwed into the first bolt hole is formed.

9. The capacitor cooling structure according to claim 8, wherein the first bolt hole includes a first large-diameter part in which the first part is housed and a first small-diameter part in which the second part is housed.

10. The capacitor cooling structure according to claim 1, further comprising a second fastening part configured to fasten the cooling part and the insulating part.

11. The capacitor cooling structure according to claim 10, wherein

the insulating part contains aluminum oxide, and

the second fastening part contains an alloy containing nickel and cobalt.

12. The capacitor cooling structure according to claim 10, wherein part of the second fastening part is brazed to the insulating part.

13. The capacitor cooling structure according to claim 10, wherein

the cooling part has a second bolt hole at which a female screw is formed, and

the second fastening part includes a third part brazed to the insulating part and a fourth part at which a male screw to be screwed into the second bolt hole is formed.

14. The capacitor cooling structure according to claim 13, wherein the second bolt hole includes a second large-diameter part in which the third part is housed and a second small-diameter part in which the fourth part is housed.

15. The capacitor cooling structure according to claim 1, wherein the first electrode is electrically connected with an output terminal of a power source device, and the second electrode is electrically connected with a third electrode having a potential between the potential of the output terminal and a reference potential.

16. The capacitor cooling structure according to claim 15, wherein the cooling part is electrically connected with the reference potential.

17. The capacitor cooling structure according to claim 1, wherein

the conducting part has a through-hole, and

the first fastening part includes a fifth part brazed to the insulating part and positioned on one side of the through-hole in a penetration direction, a sixth part positioned on the other side of the through-hole in the penetration direction, and a seventh part attached to the sixth part and configured to fix the conducting part to the insulating part.

18. The capacitor cooling structure according to claim 1, wherein the second electrode is electrically connected with an output terminal of a power source device, and the first electrode is electrically connected with a third electrode having a potential between the potential of the output terminal and a reference potential.

19. The capacitor cooling structure according to claim 18, wherein the cooling part is electrically connected with the reference potential.

20. A laser apparatus comprising:

a laser chamber;

a pair of discharge electrodes disposed in the laser chamber;

a pulse power module including a peaking capacitor and configured to apply pulse voltage between the discharge electrodes;

a preionization mechanism including a preionization capacitor and configured to ionize part of gas inside the laser chamber, the preionization capacitor including a first electrode and a second electrode;

a conducting part electrically connected with the first electrode;

an insulating part that has a first surface including a first position and a second surface including a second position, and is connected with the conducting part at the first position;

a first fastening part configured to fasten the conducting part and the insulating part to each other; and

a cooling part connected with the second position facing the first position,

the conducting part and the cooling part being electrically insulated from each other by the insulating part.