BULK ACOUSTIC WAVE FILTER DEVICE
First Claim
1. A bulk acoustic wave filter device comprising:
- a substrate comprising an insulating layer;
a resonance portion comprising a bottom electrode disposed on the substrate, a piezoelectric layer disposed above at least a portion of the bottom electrode, a top electrode disposed above at least a portion of the piezoelectric layer, and a cavity disposed below the bottom electrode;
a wiring portion connected to the resonance portion such that the top electrode or the bottom electrode extends into the wiring portion;
a connection electrode configured to connect the top electrode and the bottom electrode to an external device; and
a heat transfer member disposed outside of the cavity and connecting a portion of at least one of the bottom electrode and the top electrode that is disposed in the wiring portion to the substrate.
1 Assignment
0 Petitions
Accused Products
Abstract
A bulk acoustic wave filter device includes a substrate including an insulating layer, a resonance portion including a bottom electrode, disposed on the substrate, a piezoelectric layer, disposed above at least a portion of the bottom electrode, and a top electrode disposed above at least a portion of the piezoelectric layer, a wiring portion connected to the resonance portion such that the top electrode or the bottom electrode extends into the wiring portion, a connection electrode connecting the top electrode and the bottom electrode to an external device, and a heat transfer member connecting a portion of at least one of the bottom electrode and the top electrode that is disposed in the wiring portion to the substrate. The resonance portion is provided with a cavity disposed below the bottom electrode, and the heat transfer member is disposed outside of the cavity.
3 Citations
17 Claims
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1. A bulk acoustic wave filter device comprising:
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a substrate comprising an insulating layer; a resonance portion comprising a bottom electrode disposed on the substrate, a piezoelectric layer disposed above at least a portion of the bottom electrode, a top electrode disposed above at least a portion of the piezoelectric layer, and a cavity disposed below the bottom electrode; a wiring portion connected to the resonance portion such that the top electrode or the bottom electrode extends into the wiring portion; a connection electrode configured to connect the top electrode and the bottom electrode to an external device; and a heat transfer member disposed outside of the cavity and connecting a portion of at least one of the bottom electrode and the top electrode that is disposed in the wiring portion to the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A bulk acoustic wave filter device comprising:
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a substrate comprising an insulating layer; a resonance portion comprising a bottom electrode disposed on the substrate, a piezoelectric layer disposed above at least a portion of the bottom electrode, and a top electrode disposed above at least a portion of the piezoelectric layer; a wiring portion connected to the resonance portion such that the bottom electrode or the top electrode extends into the wiring portion; a connection electrode configured to connect the top electrode and the bottom electrode to an external device; and a heat transfer member connecting a portion of the top electrode or the bottom electrode that extends into the wiring portion to the substrate.
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17. A bulk acoustic wave filter device comprising:
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a substrate; a resonance portion comprising a top electrode, a bottom electrode, a piezoelectric layer disposed between the top electrode and the bottom electrode, and a membrane layer disposed between the bottom electrode and the substrate to form a cavity with the substrate; a first heat transfer member that connects a portion of the top electrode that extends beyond the resonance portion to the substrate; and a second heat transfer member that connects a portion of the bottom electrode that extends beyond the resonance portion to the substrate.
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Specification