MEMS DEVICES AND PROCESSES
First Claim
Patent Images
1. A MEMS transducer comprising:
- a substrate having a cavity which extends through the substrate;
a membrane which overlies the cavity;
a filter configured and arranged to inhibit the entry of particles into at least a region of the interior of the substrate cavity from a region underlying the substrate.
2 Assignments
0 Petitions
Accused Products
Abstract
The application describes MEMS devices and associated methods of fabrication. The MEMS devices comprise a filter configured and arranged to inhibit the entry of particles into at least a region of the interior of the substrate cavity from a region underlying the substrate.
11 Citations
22 Claims
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1. A MEMS transducer comprising:
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a substrate having a cavity which extends through the substrate; a membrane which overlies the cavity; a filter configured and arranged to inhibit the entry of particles into at least a region of the interior of the substrate cavity from a region underlying the substrate. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 21)
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2. A MEMS transducer comprising:
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a substrate having a cavity which extends through the substrate from a first opening in a first side of the substrate to a second opening in a second side of the substrate; a membrane which is supported relative to the second side of substrate and overlies the cavity; a filter provided within the substrate cavity or at/across the first opening of the substrate cavity.
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3. A MEMS transducer comprising a flexible membrane supported relative to a substrate cavity, the transducer having an integrated filter for providing environmental protection to at least a region of the substrate cavity.
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19-20. -20. (canceled)
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22-34. -34. (canceled)
Specification