Process of providing a controlled atmosphere containing a heat decomposable metal compound
First Claim
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1. A PROCESS OF PROVIDING A CONTROLLED ATMOSPHERE CONTAINING A HEAT-DECOMPOSABLE GASEOUS METAL-BEARING COMPOUND AND A CARRIER GAS, COMPRISING THE STEP OF CONTACTING THE HEATED METAL-BEARING COMPOUND IN THE NON-GASEOUS STATE WITH A MOVING HEATED CARRIER GAS TO FORM AN ATMOSPHERE CONTAINING GASIFIED METAL-BEARING COMPOUND WHICH IS DECOMPOSED FOR HEATING TO DEPOSIT THE METAL CONSTITUENT OF SAID COMPOUND.
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1 Claim
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1. A PROCESS OF PROVIDING A CONTROLLED ATMOSPHERE CONTAINING A HEAT-DECOMPOSABLE GASEOUS METAL-BEARING COMPOUND AND A CARRIER GAS, COMPRISING THE STEP OF CONTACTING THE HEATED METAL-BEARING COMPOUND IN THE NON-GASEOUS STATE WITH A MOVING HEATED CARRIER GAS TO FORM AN ATMOSPHERE CONTAINING GASIFIED METAL-BEARING COMPOUND WHICH IS DECOMPOSED FOR HEATING TO DEPOSIT THE METAL CONSTITUENT OF SAID COMPOUND.
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Current AssigneePeter Pawlyk
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Original AssigneePeter Pawlyk
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InventorsPETER PAWLYK
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Application NumberUS03/520,577Time in Patent Office579 DaysField of SearchUS Class Current106/1.25CPC Class CodesC23C 16/16 from metal carbonyl compoundsC23C 16/4481 by evaporation using carrie...
