Method of forming a glass film on an object and the product produced thereby

• US 3,212,921 A
• Filed: 09/29/1961
• Issued: 10/19/1965
• Est. Priority Date: 09/29/1961
• Status: Expired due to Term

• Current Assignee: Ernest E. Conrad, William A. Pliskin
• Original Assignee: Ernest E. Conrad, William A. Pliskin
• Inventors: Pliskin, William A., Conrad, Ernest E.
• Application Number:
  US04/141,668
• Time in Patent Office: 1,481 Days
• US Class Current: 427/126.2
• CPC Class Codes: C23C 16/401 containing silicon
• CPC Class Codes: C23D 11/00 Continuous processes; Apparatus therefor
• CPC Class Codes: C23D 5/02 by wet methods
• CPC Class Codes: H01B 3/088 Shaping of glass or deposition of glass
• CPC Class Codes: H01C 17/02 adapted for manufacturing resistors with envelope or housing
• CPC Class Codes: H01G 13/003 Apparatus or processes for encapsulating capacitors
• CPC Class Codes: H01L 21/02129 the material being boron or phosphorus doped silicon oxides, e.g. BPSG, BSG or PSG
• CPC Class Codes: H01L 21/02175 characterised by the metal H01L21/02197 takes precedence
• CPC Class Codes: H01L 21/02282 liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
• CPC Class Codes: H01L 21/316 composed of oxides or glassy oxides or oxide based glass
• CPC Class Codes: H01L 23/29 characterised by the material , e.g. carbon interlayer dielectrics H01L23/5329
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: Y10S 148/043 Dual dielectric
• CPC Class Codes: Y10S 148/118 Oxide films
• CPC Class Codes: Y10T 428/23 Sheet including cover or casing
• CPC Class Codes: Y10T 428/265 1 mil or less

Claims

12. THE METHOD OF FORMING A GLASS FILM ON THE SURFACE OF AN OBJECT COMPRISING:

SUBJECTING SAID OBJECT TO THE INFLUENCE OF A FLUID HAVING A DIELECTRIC CONSTANT IN THE RANGE OF 3.4 TO 20.7 AND CONTAINING A SUSPENSION OF FINELY DIVIDED GLASS PARTICLES AND APPLYING TO THE LATTER A FORCE SUBSTANTIALLY NORMAL TO SAID SURFACE TO DEPOSIT SAID PARTICLES ON SAID SURFACE;

SAID PARTICLES HAVING AN AVERAGE PARTICLE SIZE OF ABOUT AN ORDER OF MAGNITUDE SMALLER THAN THE THICKNESS OF SAID GLASS FILM;

REMOVING SAID OBJECT FROM SAID FLUID;

AND HEATING SAID OBJECT ABOVE THE SOFTENING TEMPERATURE OF SAID GLASS PARTICLES FOR A TIME SUFFICIENT TO FUSE SAID PARTICLES AND PRODUCE A THIN HOLE-FREE GLASS FILM IN THE ORDER OF MICRONS IN THICKNESS ON SAID SURFACE.