RAPID PUMP-DOWN VACUUM CHAMBERS INCORPORATING CRYOPUMPS

• US 3,485,054 A
• Filed: 10/27/1966
• Issued: 12/23/1969
• Est. Priority Date: 10/27/1966
• Status: Expired due to Term

• Current Assignee: Helix Technology Corporation (Azenta, Inc.)
• Original Assignee: Walter H. Hogan
• Inventors: Hogan, Walter H.
• Application Number:
  US04/590,061
• Time in Patent Office: 1,153 Days
• US Class Current: 62/55.5
• CPC Class Codes: F04B 37/08 by condensing or freezing, e.g. cryogenic pumps
• CPC Class Codes: H01J 9/38 Exhausting, degassing, filling, or cleaning vessels

Claims