ELECTROMECHANICAL RESONATOR FOR INTEGRATED CIRCUITS

• US 3,490,056 A
• Filed: 05/16/1967
• Issued: 01/13/1970
• Est. Priority Date: 05/16/1967
• Status: Expired due to Term

• Current Assignee: Robert T. Milton, Warren, William T.
• Original Assignee: Robert T. Milton, Warren, William T.
• Inventors: Warren, William T., Milton, Robert T.
• Application Number:
  US04/638,953
• Time in Patent Office: 973 Days
• US Class Current: 333/186
• CPC Class Codes: H01L 21/00 Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
• CPC Class Codes: H01L 29/00 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor H01L31/00 - H01L33/00, H10K10/00, H10N take precedence; details other than of semiconductor bodies or of electrodes thereof H01L23/00; devices consisting of a plurality of solid state components formed in or on a common substrate H01L27/00
• CPC Class Codes: H03H 9/50 Mechanical coupling means

Claims